Wafer level large-size molybdenum disulfide preparation furnace
This equipment is a wafer level large-size molybdenum disulfide preparation device designed based on CVD principles. It includes a three-zone tube furnace, a specially designed furnace tube and a set of supporting gas paths.
Product Description
The O1200-120III-IC-3Z-MoS2 system is a cutting-edge equipment designed for uniformly releasing reaction gas into the furnace tube, ensuring the consistency and uniformity of products in back-end wafer processes. Specifically tailored for molybdenum disulfide preparation experiments, this system features a furnace tube constructed from high-purity quartz. The external large quartz tube, measuring φ120mm x 1000mm, encloses seven internal small quartz tubes, each with dimensions of φ25mm x 820mm. The heating process is achieved through three zones, each spanning 200mm, allowing for precise and independent temperature control. With a temperature control accuracy of ±1℃, users can define 30-segment time-temperature curves for each of the three zones. The operating temperature ranges from 0 to 1150℃, with a maximum heating rate of ≤10℃/min.
The intake system of the system incorporates a three-channel mass flow meter, enabling control over Ar gas (0 to 500sccm), N2 gas (0 to 200sccm), and H2 gas (0 to 200sccm). Adding to its versatility, the system features seven channels for gas separation and mixing within the gas path. The furnace tube is equipped with a stainless steel water-cooled flange and includes a KF16 vacuum interface, mechanical vacuum gauge, and stainless steel needle valve. The power requirements for this system are AC 220V 50Hz, with a power rating of 4kW. The control interface, a user-friendly 7-inch touch screen, enhances the overall usability of the system. For vacuum operations, a dual-stage rotary vane vacuum pump is employed, offering a theoretical ultimate vacuum degree of 10^-1Pa. The comprehensive design and technical capabilities make this system an ideal choice for advanced experimentation and material preparation.
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