Ultra-High vacuum thermal evaporation coater with four heating sources
Ultra-High vacuum thermal evaporation coater is designed for coating oxygen sensitive metallic materials, such as Ti, Al, and Ir etc. It also can be used for coating all kinds of materials. It has four evaporation heater sources and coat two type of materials at the same time at high vacuum up to 10-6 torr.
Product Description
Our Ultra-High Vacuum Thermal Evaporation Coater is a cutting-edge experimental device designed for precision coating with outstanding cost performance. Featuring four independently operable evaporation heating boats, each equipped with a rotatable baffle, this coater ensures contamination-free vapor deposition by intelligently covering inactive tungsten boats. This versatile configuration allows for the evaporation coating of organic materials, catering to the research needs of light-emitting devices and organic solar batteries.
With a keen focus on meeting diverse operational requirements, the coater operates on an input power supply of 208 - 240VAC, 20 A, 50/60 Hz, single phase, demanding a total power of 8KW, including the pump. The vacuum chamber, constructed from stainless steel, offers a spacious 23-liter volume with a sand-blasted, electrolytically polished surface. The chamber integrates a 100mm observation window for visibility and a hinged-type door for convenient sample loading. Four KF40 ports are seamlessly integrated into the chamber, enhancing connectivity.
The heart of the system lies in the high-speed turbo vacuum pump, ensuring a vacuum speed of 600L/S. The coater achieves an impressive vacuum level of 5.0x10-6 Torr after 40 minutes of pumping, reaching a limit vacuum of 5.0x10-7 Torr after baking at 100 - 150°C. The system's leakage rate is 5.0x10-7 Pa, and the vacuum port boasts a diameter of 150mm. The four tungsten heating boats, supported by water-cooled electrodes, guarantee efficient and reliable operation. These boats, each equipped with a manual operation shutter, maintain a contamination-free environment.
The sample holder, located atop the chamber, is a rotating platform with a 100mm diameter and a heating capacity of up to 600°C. Controlled by a digital temperature controller with an accuracy of +/-1°C, the sample holder's distance from the evaporation source is adjustable within the range of 150-300mm. The coater's control unit, housed in a separate box for mobility, integrates vacuum, thickness, and power control. The coater's overall dimensions are L600mm×W860mm×H1500mm, with a net weight of 600 kg.
Installation requirements encompass a space of 250 square feet with a height exceeding 6 feet. The power supply should be 208 - 240V AC, single phase, with a maximum rating of 10KW (50A breaker). Additionally, a water supply exceeding 15 liters per minute is essential for electrode cooling. These specifications collectively position our Ultra-High Vacuum Thermal Evaporation Coater as an advanced and versatile tool for precise coating applications.
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