Two Zone 1200°C Max. 80 mm OD Tube Furnace with Liquid Evaporator, Humidity & H2 Detectors and Shutoff Valve
1200X-80HG is a two heating zone tube furnace with two-channel gas flow control, liquid evaporator, humidity monitor, as well as hydrogen gas leaking detector. Such as system is designed for hot corrosion research or CVD processing with hydrogen gas under controlled humidity condition. One of the two CVD gas line through the liquid evaporator assists with the delivery of liquid vapor. Precision digital humidity monitor can measure water content with accuracy +/-1.5 % FS. The included hydrogen monitor will shut off the hydrogen gas inlet valve immediately upon detecting leaks of hydrogen gas.
Product Description
The 1200X-80HG is a cutting-edge two-heating zone tube furnace equipped with a range of advanced features for hot corrosion research or controlled humidity conditions in CVD processing with hydrogen gas. Designed with precision and safety in mind, the furnace boasts a two-channel gas flow control system, a liquid evaporator, humidity monitor, and a hydrogen gas leak detector. The system's digital humidity monitor ensures accurate measurement of water content with an impressive accuracy of +/- 1.5% FS.
Safety measures are paramount, with the hydrogen monitor automatically shutting off the hydrogen gas inlet valve upon detecting any leaks. The double-shell casing incorporates cooling fans and utilizes high-purity alumina fibrous insulation for optimal energy efficiency. The split cover design allows for quicker cooling and user-friendly operation. Notably, the hydrogen gas furnace must be placed under a fume hood (not included).
Operating at a maximum capacity of 4 KW, the furnace requires an input voltage of AC 208-240V single phase with a 30A air breaker. The heating elements, composed of FeCr27Al7MO2, feature two heating zones, each measuring 8" (200 mm) in length, providing a total constant temperature zone of 150 mm with a precision of +/- 1℃ when set at the same temperature. Temperature uniformity is maintained at +/- 1°C within the heating zone, supporting continuous operation at 1100°C with a recommended heating rate of 10°C/min.
The processing tube, constructed from high-purity quartz, measures Φ 80 (OD) × Φ 74 (ID) × 1000 L, mm. The vacuum flange comprises SS304 flanges, enabling a vacuum of up to 10^ - 5 torr with a turbopump. Two MET certified digital temperature controllers with 30 programmable segments ensure precise control, including heating rate, cooling rate, and dwell time. The furnace also features over-temperature protection and an RS485 port for PC connection.
A range of additional components enhances the furnace's functionality, including two flowmeters on the gas inlets, a liquid evaporator with a stainless steel container, and a precision humidity monitor with adjustable parameters. The hydrogen detector operates within a temperature range of 40ºF to +149ºF, triggering an automatic shutdown if hydrogen gas exceeds 10% LEL. The furnace is covered by a one-year limited warranty, with dimensions of 1400 × 600 × 1200 mm and a net weight of 100 Kg.
It's important to note that tube furnaces with alumina tubes are suitable for use under vacuum and low pressure (< 0.12 atm), and gas flow rates should be limited to < 200 SCCM to minimize thermal shocks. A two-stage pressure regulator is required to maintain safe gas pressure, and vacuum pressures are only recommended up to 1000°C for all quartz tube furnaces.
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