Two-dimensional molybdenum sulfide growth equipment
The two-dimensional material growth device is composed of a preheating furnace, a reaction furnace, a vacuum system, a gas supply system, and a sliding rail support. The preheating furnace can be used to preheat and evaporate the solid state source, and the reaction furnace can provide the thermal environment required for the reaction. Both electric furnaces are mounted on the slide rail support, which can realize rapid temperature rise and fall, and increase the efficiency of the experiment. Thermocouple temperature measurement is provided in the furnace tube to precisely control the reaction conditions. All circuits are controlled by high-definition full-color touch screen, which is easy to operate and easy to use.
Product Description
The gas supply system of this equipment incorporates a two-channel mass flowmeter, providing precise flow control with an easy and intuitive operation. Complementing this, the vacuum system utilizes a high-quality two-stage rotary vane vacuum pump, achieving a vacuum degree of 10E-1Pa, meeting the requirements for CVD crystal growth experiments.
Specifically designed for two-dimensional material growth through the CVD method, with a focus on two-dimensional molybdenum sulfide preparation, this equipment integrates a preheating furnace (model O1200-100I-T-S) and a single heating zone tube furnace (model O1200-100I-T).
The preheating furnace features a chamber length of 300mm, a heating zone length of 200mm, and a constant temperature zone of 100mm, operating within a temperature range of 0 to 1100°C. Its advanced temperature control, with an accuracy of ±1°C, is facilitated through a 30 or 50 segment program temperature control mode, displayed on an LCD with an HD full-color touch screen. The power supply is rated at AC 220V, 50/60Hz. Similarly, the single heating zone tube furnace, with a chamber length of 440mm, a heating zone length of 400mm, and a constant temperature zone of 200mm, maintains a working temperature range of 0 to 1100°C with the same temperature control accuracy. The furnace tubes in both components are constructed from high purity quartz.
The gas supply system incorporates a two-channel mass flowmeter with a flow range of 0 to 200SCCM and a measurement accuracy of ±1.5% F.S. The system includes a mechanical pump with a pumping rate of 1.1L/s, achieving an ultimate vacuum of 1.0E-1Pa. The exhaust system's power supply is rated at AC 220V, 50/60Hz, with a KF16 pumping interface. The equipment's functionality is enhanced by sliding rails with a length of 1.8m to 2m, facilitating the rapid temperature rise and fall during operation. The entire system maintains a working temperature between 5~45°C, ensuring an efficient and precise environment for molybdenum sulfide growth in two-dimensional applications.
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