Touch Screen Compact Three Rotary Target Plasma Sputtering Coater

It can coat 1- 3 types of metallic materials to sample with diameter up to 50 mm. Three sputtering targets: gold, silver, copper are included for immediate use. Presenting the Touch Screen Compact Three Rotary Target Plasma Sputtering Coater, a precision instrument with a host of specifications to meet your coating needs. It operates on a single-phase 220 VAC power supply at 50/60Hz, consuming 700W, which includes the vacuum pump. For users with a 110V AC power source, worry not, as we include a transformer for seamless compatibility, allowing you to select the voltage in the Product Options. The coater delivers an output power of 1600 VDC, with a maximum current of 40 mA. The vacuum chamber, fabricated from high-purity quartz, features dimensions of 150 mm in inner diameter and 150 mm in height, with a sealing flange crafted from stainless steel and equipped with a flat O-ring. A sample stage, boasting a diameter of 50 mm, provides flexibility with an adjustable sputtering distance ranging from 25 to 40 mm. This stage is rotatable, offering three sputtering positions, all conveniently controlled via the integrated 6-inch color touch screen. Furthermore, a built-in substrate heater enables heating to a maximum temperature of 500°C, with precise temperature control facilitated by a PID temperature controller boasting an accuracy of +/- 1°C, all accessible through the touch screen interface. The control panel is designed for user-friendliness, featuring a 6-inch color touch screen with PLC integration. This panel integrates vital instruments such as a vacuum gauge, sputtering current meter, and substrate temperature control, streamlining your workflow. Adjustment knobs on the front panel allow for gas intake and sputtering current control. In addition, the touch screen provides access to sputtering position adjustments, a sputtering timer, and process logging. Safety is a priority, and a stainless steel shield cage is included to provide extra protection. For your sputtering needs, the coater includes three targets meeting the specifications of 47 mm in diameter and 2.5 mm in thickness. These targets are included in the standard package, featuring Au (47 mm Dia. x 0.12 mm), Ag (47 mm Dia. x 0.5 mm), and Cu (47 mm Dia. x 2.5 mm). For vacuum pump connectivity, a built-in KF25 vacuum port is provided, but please note that the vacuum pump with a KF25 connector is required for operation, though not included. Users can choose between a double-stage mechanical vacuum pump for vacuum up to 10^-2 Torr or a turbo pump for vacuum up to 10^-4 Torr. The vacuum pump can be easily plugged into the power outlet on the left of the coater for automatic control. In terms of dimensions, the coater measures 440 mm in length, 330 mm in width, and 455 mm in height, with a net weight of 50 kg. This comprehensive sputtering coater is designed to meet your precise coating needs, offering both convenience and performance.