Three targets RF magnetron sputtering coater MSP300S-3RF
Three heads magnetron sputtering coater is a special laboratory coating machine developed by our company. The equipment can be used to prepare single or multilayer ferroelectric thin films, conductive films, alloy films, semiconductor films, ceramic films, dielectric films, optical films, etc.
Product Description
Our Magnetron sputtering coating equipment stands as a specialized laboratory marvel, meticulously crafted by our company to meet the demands of precision thin-film preparation. This advanced equipment is equipped with both DC and RF power supplies, ranging from 500W to 1000W, allowing for the versatile creation of single or multilayer ferroelectric thin films, conductive films, alloy films, semiconductor films, ceramic films, dielectric films, and optical films, among others. Compared to conventional plasma sputtering, our magnetron sputtering technology boasts advantages such as high energy, rapid deposition rates, and minimal sample temperature elevation.
The key to its stability lies in the water-cooled interlayer embedded in the magnetron target. This innovative feature efficiently dissipates heat, preventing its accumulation on the target surface and ensuring prolonged and consistent operation. With a harmonious blend of compact design, aesthetic appeal, and comprehensive functionality, this equipment is not only a technological powerhouse but also a user-friendly tool. Its operation is seamlessly controlled through a touch screen interface and a built-in one-button coating program, making it an ideal choice for laboratory thin film preparation.
Introducing our three-target RF magnetron sputtering coater, meticulously designed with specific technical parameters for optimal performance. Operating on AC220V, 50Hz power supply with a robust 6KW capacity, the coater achieves an impressive ultimate vacuum level of 5x10-4Pa, indicative of its ability to produce high-quality coatings. The sample table parameters include a φ150mm table size, providing ample space for sample placement. It can withstand a maximum heating temperature of 500℃ while maintaining precise temperature control with an accuracy of ±1℃. Additionally, the coater offers adjustable rotation speeds from 1 to 20rpm, accommodating diverse coating requirements effectively.
The coater's configuration features three 2-inch magnetron sputtering heads, efficiently cooled by a water-cooling system requiring a flow rate of 10L/min. This cooling mechanism ensures consistent and reliable sputtering performance. Further enhancing its efficiency is a dedicated water chiller that supports the cooling process, contributing to efficient heat dissipation. The vacuum chamber, constructed from high-quality SUS material with dimensions of φ300mm in diameter and 340mm in height, guarantees durability and corrosion resistance. An open-type design simplifies the replacement of targets and enhances operational convenience.
For precise control over the gas environment, the coater features a one-channel gas flow controller with a 200sccm capacity for argon (Ar) gas. The vacuum pump system relies on a molecular pump with a high pumping speed of 600L/S, crucial for maintaining desired vacuum conditions during the coating process. A quartz vibrating film thickness gauge, offering precise measurements with a resolution of 0.10 angstrom, ensures accurate monitoring of film thickness. The coater's power source includes three RF power supplies, each rated at 500W, making it suitable for preparing non-metallic films. Operation is facilitated through an all-in-one computer interface, providing a user-friendly control and monitoring platform.
In terms of physical dimensions, the coater boasts an overall footprint of 1090mm x 900mm x 1250mm, making it versatile for various laboratory or industrial settings. With a total weight of 350kg, it ensures stability and ease of integration into the chosen environment. These technical specifications collectively position the three-target RF magnetron sputtering coater as a versatile, reliable, and advanced tool for a myriad of coating applications.
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