Three target plasma sputtering coater
This type of small plasma sputtering coating machine adopts two-stage sputtering method, which is widely used for SEM sample preparation or metal coating experiment. Using low-temperature plasma sputtering process, there is no high temperature during the coating process, and it is not easy to produce thermal damage
Product Description
This small plasma sputtering coater uses PLC control system, all touch screen operation, easy to learn and use. This small plasma sputtering instrument uses a PLC control system, all touch screen operation, easy to learn and use. The equipment is small in size and beautiful in appearance, making it the best choice for laboratory coating experiments. The specifications for the three target heads small plasma sputtering coater are as follows: The sample stage has a size of 100mm and offers height adjustability within a range of 20~35mm, providing flexibility in sample positioning. The coater is equipped with three 2-inch plasma sputtering sources for material deposition and employs a natural cooling method to maintain optimal operating temperatures. The vacuum chamber features dimensions of φ180mm x 210mm and is constructed from high-purity quartz, ensuring a clean and controlled environment for coating processes. It includes an omnidirectional observation window for easy monitoring and maintenance. The chamber is designed with a removable top cover, and both the upper and lower cover materials are made of 304 stainless steel, offering durability and ease of access. For vacuum operations, the coater utilizes a dual-stage rotary vane vacuum pump with a pumping rate of 1.1L/s (4m3/h) and the capability to achieve an ultimate vacuum of ≥0.1Pa. The vacuum system incorporates KF16 ports for pumping and exhaust, along with a resistance vacuum gauge for precise measurement. Power is supplied via an AC 220V, 50Hz source, and the total power consumption of the coater is 1.5kW. With overall dimensions of 500mm x 320mm x 470mm and a weight of 30kg, this small plasma sputtering coater provides a compact and efficient solution for various coating applications, offering flexibility, precision, and ease of use.