Three sputter heads plasma sputtering coater PSP180G-3TA
This type of small plasma sputtering coating machine adopts two-stage sputtering method, which is widely used for SEM sample preparation or metal coating experiment. Using low-temperature plasma sputtering process, there is no high temperature during the coating process, and it is not easy to produce thermal damage.
Product Description
This small plasma sputtering coater uses PLC control system, all touch screen operation, easy to learn and use. This small plasma sputtering instrument uses a PLC control system, all touch screen operation, easy to learn and use. The equipment is small in size and beautiful in appearance, making it the best choice for laboratory coating experiments. The technical parameters of the Three Sputter Heads Plasma Sputtering Coater, identified as PSP180G-3TA, are as follows: The sample stage has a size of 100mm and is adjustable in height within the range of 20~35mm from the target surface. This coater is equipped with three 2-inch plasma sputtering sources and employs natural cooling for temperature control. The vacuum chamber features dimensions of φ180mm x 210mm and is constructed from high-purity quartz, providing omnidirectional visibility through an observation window. The chamber's top cover is removable for easy access, and the upper and lower covers are made of 304 stainless steel. For vacuum operations, the coater utilizes a dual-stage rotary vane vacuum pump, with KF16 pumping and exhaust ports. The pumping rate is 1.1L/s (equivalent to 4m3/h), and the ultimate vacuum level is maintained at ≥0.1Pa. Vacuum measurements are conducted using a resistance vacuum gauge. The coater is powered by AC 220V, 50Hz, with a total power consumption of 1.5kW. In terms of sputtering power configuration, a single DC power supply is employed, delivering a maximum output power of 150W. The sputtering power itself reaches 1200V, with a maximum sputtering current of 50mA. The overall dimensions of the coater are 500mm x 320mm x 470mm, and it weighs a total of 30kg. These specifications make the PSP180G-3TA a versatile and efficient tool for plasma sputtering applications.