Three-source high vacuum evaporation coater

The chamber is equipped with an upper sample stage, and the clamping or clamping sample mounting parts can be selected according to the user's sample style. The sample stage is rotatable, heated, and all operations are integrated through the touchscreen. The vacuum pump group of the equipment is a two-stage vacuum system, which consists of a bipolar rotary vane vacuum pump and a turbo molecular pump, which can provide a clean and oil-free high vacuum environment for vacuum coating experiments; the vacuum system contains a complete pneumatic valve system, users can One-button operation through the touch screen realizes operations such as vacuum extraction, non-stop sampling, and complete shutdown. high vacuum evaporation coater Detail intruduction: There are three groups of evaporation sources in this equipment, which are tungsten boat evaporation sources and water-cooled copper electrodes, which can support a maximum current of 260A, and the heating temperature can reach up to 1800℃. It can realize the evaporation of various refractory metals. The three groups are independent Thermal evaporation source, will not cause mutual contamination of plating materials. The equipment adopts an integrated design, the cavity and the electric control part are separated left and right, which realizes the separation of water and electricity, and effectively ensures the safety of users. The electronic control part adopts the design of the combination of touch screen and button panel. Auxiliary functions such as vacuum system and sample stage are operated by one button on the touch screen, and power-on evaporation and film thickness control are operated independently through the panel, which is as convenient as possible for users at the same time. Avoid the possibility of misuse. The equipment has perfect design and excellent performance, and is a must-have for high-precision evaporation coating experiments in laboratories. The High Vacuum Evaporation Coater, a versatile instrument, finds application in various fields, including the manufacture of metal and dielectric films, thin-film sensor production, optical elements, nano and microelectronics, and solar battery development. Its technical parameters highlight its capabilities as a Three Evaporation Source High Vacuum Coater. The sample stage supports samples of up to φ150mm in size, featuring rotation and heating capabilities up to 500°C. The coater is equipped with three independent tungsten boat evaporation sources, each with its dedicated power supply. The vacuum chamber boasts dimensions of φ300x400mm, with a front φ100mm observation window, constructed from 304 stainless steel and accessible through a front door. Optional film thickness control can be achieved with a crystal-type film thickness measuring instrument and a multi-channel film thickness controller. The vacuum system consists of a bipolar rotary vane pump serving as the foreline pump with a KF16 exhaust port and a turbomolecular pump as the secondary pump with a CF160 exhaust port. Vacuum measurement is conducted using a resistance + ionization composite vacuum gauge. The system exhibits an exhaust rate of 1.1L/s for the mechanical pump and 600L/s for the molecular pump, achieving an ultimate vacuum of 1.0E-5Pa. Power supply requirements are AC 220V 50/60Hz. The control system is governed by PLC automatic control, with an operation interface comprising a touch screen and an operation panel. The touch screen facilitates the deposition process control and fast data entry, while user-friendly PLC software can be updated via the network. Additional specifications include a supply voltage of AC380V, 50Hz, overall dimensions of 1000mm X 800mm X 1500mm, a total power consumption of 5kW, and a total weight of 350kg. These parameters collectively establish the High Vacuum Evaporation Coater as an advanced tool for precise thin-film coating across diverse applications.