Small two-in-one coating machine (plasma sputtering & thermal evaporation)
The small plasma sputtering and evaporation two-in-one coating machine is equipped with DC sputtering target and thermal evaporation assembly, which can not only be used for metal film plating by plasma sputtering, but also obtain carbon or other metal elemental films by evaporation.
Product Description
The EVS180G-LV, a small two-in-one coating machine, seamlessly integrates two essential coating functions within the same chamber, offering a compact and versatile solution for various applications. The instrument's components are intricately designed to achieve efficient gold spraying, gold steaming, carbon spraying, and non-conductive material test electrode production. Operating within a high-purity quartz chamber, the entire coating process is observable, ensuring precision and control.
Equipped with a two-stage rotary vane vacuum pump, this instrument swiftly reaches a vacuum level of 1.0E-1Pa, meeting the stringent requirements for evaporation coating experiments and diode sputtering. Its modest size not only saves valuable laboratory space but also makes it suitable for placement on standard test benches. The cost-effective nature of this machine, with its ability to serve multiple purposes, positions it as an ideal choice for major universities and research institutions.
The EVS180G-LV features a sample stage with a diameter of φ80mm and an adjustable distance to the evaporation source ranging from 20mm to 50mm. The DC sputtering head, incorporating a 2" head, enhances the versatility of the equipment. For evaporation processes, a tungsten wire basket serves as the source, withstanding temperatures up to 1700℃, and temperature monitoring facilitated by an S type thermocouple. The vacuum chamber, constructed from high-purity quartz with dimensions of φ180mm×100mm, includes a removable top cover for convenient access and operation.
The vacuum system utilizes a rotary vane pump with a KF16 pumping connector and a resistance gauge for accurate vacuum measurements. The exhaust connector is also a KF16 fitting, and the system achieves an ultimate vacuum of 1.0E-1Pa. Operating on AC 220V at 50/60Hz, the rotary vane pump provides a pumping rate of 1.1L/S. Sputter power configuration includes one DC power supply with a maximum output of 150W. With overall dimensions measuring 360mm×300mm×470mm, a total power rating of 1.5kW, and a weight of 15kg, the EVS180G-LV stands as a reliable and efficient solution for a diverse range of coating applications in laboratory settings.
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