Small thermal evaporation coater for glove box type

SKU: MND-134149
Model: EVP180G-1S-G(G means glove box)

small thermal evaporation coater for glove box type is a small desktop evaporation coater specially designed for glove box type ,it can can meet the evaporation of a variety of common metal and part of non-metal

 Product Description

small thermal evaporation coater for glove box type is a small desktop evaporation coater specially designed for glove box type ,it can provide a maximum of 100A coating current,the maximum evaporating temperature up to 1800℃,and can meet the evaporation of a variety of common metal and part of non-metal. The vacuum chamber is made of high purity quartz , which is easy to observe the coating process and easy to clean ;When coordinating with the molecular pump group it can achieve the limit vacuum of 5x10-4 Pa , which can effectively ensure the purity and binding force of the evaporated film . The small size of the instrument, through miniaturization design, can effectively save laboratory space, specially designed for use in glove box; Its simple operation, strong adaptability to different materials , very suitable for laboratory purchase. The small thermal evaporation coater designed for glove box applications, with the product model EVP180G-1S-G (where 'G' signifies glove box compatibility), comes with specific technical parameters. To ensure optimal performance, it requires installation under certain conditions. The ambient working environment should maintain a temperature of 25℃±15℃ and a humidity level of 55%Rh±10%Rh. The equipment necessitates an AC220V power supply at 50Hz with proper grounding and has a rated power consumption of 1200W. To facilitate cleaning, the equipment chamber should be filled with argon gas, prepared by the customer, with a purity of ≥99.99%. Additionally, the table's dimensions should be 580mm×250mm×330mm, with a minimum bearing capacity of ≥30kg. Adequate ventilation and cooling in the setup location are essential. The technical indicators of this coater include a 10V evaporation source voltage, continuous adjustment of the evaporation current within the range of 0 to 100A, and the presence of a tungsten boat and tungsten basket. It features a stainless steel sample table with a diameter of 60mm, and the distance between the sample platform and the evaporation source is adjustable from 20 to 55mm. The vacuum cavity consists of a quartz cavity measuring 180mm in diameter and 100mm in height, with a KF16 air pumping interface and a 1/4 inch double ferrule joint for the air intake interface. The coater is equipped with a 7-inch color touch screen, offering adjustable sputtering current and safety parameters. Safety protection measures include automatic cutoff for overcurrent and excessively low vacuum conditions. With a matching molecular pump, the coater achieves an ultimate vacuum of 5E-4Pa. Vacuum measurement is performed using a Parana vacuum gauge with a range of 1 to 10^5Pa. To address the needs of materials sensitive to oxygen, it is recommended to add a molecular pump group. Moreover, achieving a high-oxygen-free environment requires cleaning the vacuum chamber at least three times with high-purity inert gas. Optional accessories include a Film Thickness Monitor with impressive film thickness resolution, accuracy, and measuring speed. It offers a flexible measurement range and is suitable for various wafer frequencies and sizes. Other accessories encompass tungsten boat, tungsten basket, organic evaporation source, high-performance molecular pump sets, bipolar rotary vane vacuum pump, vacuum bellows, film thickness meter crystal oscillator, and more, catering to diverse coating requirements.