Small plasma sputtering and evaporation two-in-one coating machine EVS180G-LV
The small plasma sputtering and evaporation two-in-one coating machine is equipped with DC sputtering target and thermal evaporation assembly, which can not only be used for metal film plating by plasma sputtering, but also obtain carbon or other metal elemental films by evaporation.
Product Description
The instrument components are highly integrated, which realize two kinds of coating functions in the same chamber. This coating machine adopts high purity quartz chamber as vacuum chamber, and the coating process is completely visible. The instrument is equipped with two stage rotary vane vacuum pump, which can quickly reach the vacuum degree of 1.0E-1pa, and can meet the vacuum environment required by most evaporation coating experiments and diode sputtering experiments. This instrument has small size which can save space and can be used on the test bench. One machine has multiple purposes, which is cost-effective and very suitable for major universities and research institutions to choose. Small two-in-one coating machine applications: Scanning electron microscope sample surface gold spraying, gold steaming carbon spraying and other operations, as well as the production of non-conductor material test electrode. The Small plasma sputtering and evaporation two-in-one coating machine, identified as EVS180G-LV, encompasses a set of technical parameters tailored for efficient coating applications. Featuring a sample stage with a φ80mm size and adjustable distance to the evaporation source within the range of 20mm to 50mm, this coater offers flexibility for sample preparation. It is equipped with a single 2-inch DC sputtering head and utilizes a tungsten wire basket as the evaporation source, capable of reaching temperatures up to 1700℃. Temperature measurement is facilitated by an S type thermocouple. The vacuum chamber, constructed from high-purity quartz, boasts dimensions of φ180mm×150mm, with an omnidirectional transparent watch window and a top cover that is removable for easy access. Vacuum operations are handled by a mechanical pump, specifically a rotary vane pump, which achieves a pumping rate of 1.1L/s. Vacuum measurements are conducted using a resistance gauge, and both pumping and exhaust connectors are of KF16 type. The coater operates on AC 220V, 50/60Hz power supply, with a total power consumption of 1.5kW. In terms of sputtering power configuration, a single DC power supply is employed, delivering a maximum power output of 150W. The overall dimensions of the machine are 360mm×300mm×470mm, and it weighs a total of 20kg. This configuration makes the EVS180G-LV a compact yet versatile tool for a variety of coating processes.