Small double furnaces sliding tube furnace O1200-50SDM

SKU: MND-134449
Model: O1200-50SDM

This product is a small double furnaces sliding tube furnace with a quartz tube of Φ50×1400mm and a stainless steel sealing flange. The maximum temperature of the instrument can reach 1200℃.

 Product Description

The dual furnace system features sliding bodies on rails for efficient evaporation/sublimation of raw materials and film deposition. Designed for rapid heat treatment at a low cost, the furnace can be preheated to the desired temperature, swiftly moved to the sample position for the fastest heating, and then relocated to the opposite end for optimal cooling. This versatile system offers the option to include electric slide rails, a mass flow meter (MFC)-controlled gas supply system, and a plasma RF power supply to construct a TCVD system suitable for various applications, including graphene and sulfide preparation.

 

The O1200-50SDM model of the small double furnace sliding tube furnace presents a compact and adaptable solution. Constructed with high-purity quartz for the tube material, it provides flexibility in tube diameter, ranging from 50mm (with optional choices of 60mm, 80mm, or 100mm). The total tube length is 1400mm, with a furnace chamber length of 300mm. The heating zone covers 200mm and maintains an operating temperature range of 0 to 1100℃, featuring an impressive temperature control accuracy of ±1℃. Users can select from a 30 or 50 segment program temperature control mode, with information displayed on a digital tube digital display for clear visibility. The robust sealing mechanism includes a 304 stainless steel vacuum flange, a flange interface equipped with a 1/4" ferrule connector, and a KF16/25/40 joint. Operating with a vacuum level of 4.4E-3Pa, this system utilizes an AC power supply rated at 220V with a 50/60Hz frequency.

 

The gas supply system, model 3F, adopts a 3-channel configuration with gas mass flow meters for precision. Channel A supports 0 to 100SCCM of H2 gas, with customizable options for other gases and ranges. Channel B covers 0 to 300SCCM for N2 gas, while channel C accommodates 0 to 500SCCM for Ar gas, maintaining a measurement accuracy of ±1.0%F.S. This well-designed system withstands pipe pressure resistance of 3MPa and a working pressure difference of 50 to 300KPa. Connecting pipes and gas channels are crafted from durable 304 stainless steel, featuring needle valves for precise control. The interface specification employs 1/4" ferrule connectors for gas inlet and outlet. The exhaust system integrates a mechanical pump and a rotary vane pump, achieving a pumping rate of 1.1L/s with a KF16 exhaust interface and vacuum measurement through a resistance gauge. The ultimate vacuum level achievable is 1.0E-1Pa. The exhaust system operates on AC power at 220V with a 50/60Hz frequency, interfacing through KF16 for pumping.

 

 

 

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