Small desktop single-target DC magnetron sputtering coater MSP180G-DG
Small desktop single-target DC magnetron sputtering coater is a cost-effective magnetron sputtering coating equipment independently developed by our company. It has the characteristics of miniaturization and standardization.
Product Description
The DC magnetron sputtering coater with a versatile 1-inch and 2-inch magnetron target head selection provides a tailored approach for customers based on their substrate size preferences. With a 150W DC power supply designed for metal sputter coating, this device is equipped with a gas inlet port to introduce protective gas, offering flexibility for experimental needs. For customers requiring mixed gases, the addition of a high-precision mass flow meter can be arranged by contacting the staff. The instrument incorporates an advanced turbomolecular pump set, achieving an impressive ultimate vacuum of up to 1.0E-5Pa, with alternative molecular pump options available.
The small desktop single-target DC magnetron sputtering coater finds applications in the preparation of single-layer ferroelectric thin films, conductive films, and alloy films. Its compact, highly integrated design allows it to sit conveniently on a desktop, making it an ideal choice for laboratory film material preparation. Technical specifications of this coater include a sample stage with a φ138mm size, reaching a maximum heating temperature of 500℃ with precise temperature control. The adjustable rotational speed, ranging from 1 to 20rpm, enhances flexibility in coating processes. Featuring a single 2-inch magnetron sputtering head, the coater ensures efficient water cooling, requiring a flow rate of 10L/min for optimal performance. A dedicated circulating water chiller further supports cooling processes, maintaining consistent and reliable sputtering.
Constructed from high-purity quartz, the vacuum chamber with dimensions of φ180mm×215mm provides a contamination-free environment for coating. The transparent watch window offers unobstructed observation of the coating process, and the top cover allows for easy sample loading and target replacement. Gas flow control is facilitated by a two-channel mass flowmeter, offering precise measurements within a standard range of 100SCCM, customizable to meet specific requirements. The vacuum system, featuring a molecular pump (600) and a rotary vane pump, efficiently generates vacuum conditions, achieving an ultimate vacuum of 1.0E-5Pa. Vacuum measurements are conducted through a compound vacuum gauge.
Power supply specifications include an AC220V 50/60Hz power source, and the coater configuration integrates a single DC power supply with a maximum output power of 150W, catering to a variety of coating processes. Compact and portable, the coater measures 500mm×350mm×400mm, making it suitable for both laboratory and small-scale industrial settings. With a total weight of approximately 30kg, it provides portability and ease of integration, collectively establishing the small desktop single-target DC magnetron sputtering coater as an efficient and versatile tool for precision coating applications.
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