Single target magnetron sputtering coater with tiltable sample stage
This equipment is a single-target magnetron sputtering coater with a tiltable sample stage. The angle between the sample stage and the target surface is adjustable, and it can be used to make films with specific growth angles. The appearance of the equipment is desktop level, which greatly reduces the installation site requirements.
Product Description
The MSP180S-DC-GU magnetron sputtering coater is equipped with a DC power supply tailored for the sputtering of metal and other conductive materials. Its vacuum system adopts a turbomolecular pump group, ensuring rapid pumping speed, a high ultimate vacuum degree, and excellent overall vacuum performance. The equipment, characterized by a compact structure and seamless functionality, proves to be user-friendly and well-suited for diverse coating tests.
Delving into the technical parameters of the MSP180S-DC-GU, the sample stage boasts a Φ60mm size with adjustable rotating speeds ranging from 0 to 20 RPM. Accommodating a 2-inch target for magnetron sputtering, the coater's vacuum chamber takes on a cylindrical shape with dimensions of Φ180mm x 150mm. Constructed from high-purity quartz, the chamber ensures omnidirectional visibility through an observation window, with a removable top cover for convenient access. The lower flange houses both a sample table tilt mechanism and a rotation mechanism.
The vacuum system is meticulously designed, featuring a two-stage rotary vane pump serving as the mechanical pump with a KF16 pumping interface, and a turbomolecular pump as the molecular pump with a KF40 pumping interface. Vacuum measurement utilizes a resistance gauge and an ionization gauge, with an exhaust interface at KF40, achieving an ultimate vacuum of 1.0E-3Pa. Power requirements include AC 220V at 50/60Hz, with pumping rates specified as 1.1L/s for the backing pump and an impressive 60L/s for the molecular pump.
The power configuration revolves around a single DC power supply, offering a maximum output power of 300W. Operating on AC 220V, 50Hz, and featuring overall dimensions of 500mm x 320mm x 620mm, the coater has a total power consumption rated at 2kW. These detailed technical specifications provide a comprehensive overview of the MSP180S-DC-GU magnetron sputtering coater, ensuring a clear understanding of its features, capabilities, and dimensions.
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