Single heating zone rotary PECVD graphene preparation tube furnace
Single heating zone rotary PECVD, equipped with vacuum automatic feeder, and KF40 interface reserved at the end of the furnace tube can be connected to the receiving tank. The feeder adopts screw feeding, the powder can be fed into the furnace tube at a rated rate, and the feeding rate can be changed by adjusting the rotary speed. It can realize the continuous coating and modification of powder materials by PECVD method under the atmosphere protection environment. The receiving tank can collect the processed powder under the atmosphere protection environment.
Product Description
The rotary PECVD tube furnace, with its advanced design and precise specifications, stands as a powerful tool for scientific experiments, particularly in applications such as graphene preparation and particle coating. Equipped with a 150W RF power supply operating at 13.56MHz, this furnace has the capability to generate high-energy plasma in a vacuum environment. The plasma, in turn, effectively activates the sample surface, enhancing reaction effects and accelerating reaction rates. This auxiliary method is especially advantageous for experiments involving granular samples.
A distinctive feature of this equipment lies in its mechanical transmission system, allowing for the continuous rotation of the working tube at 360° with an adjustable rotation speed. This dynamic mechanism ensures thorough stirring and mixing of materials within the tube, promoting optimal contact with gas and plasma. Consequently, the reaction of the sample becomes more uniform and stable, making this furnace particularly well-suited for granular sample experiments.
The technical parameters of the rotary PECVD tube furnace include a 150W RF power supply with a precision of ±1% and stable operation at 13.56MHz with fluctuations within ±0.005%. Operating at a maximum power of 2KW and a temperature range up to 1200°C, the furnace features a single 200mm heating zone. Temperature control accuracy is maintained at ±1°C through an AI-PID control system with a 30-stage process curve for storing multiple profiles. The furnace tube, constructed from high-purity quartz, ensures a controlled environment, sealed by a vacuum stainless steel flange and KF16 flange. The furnace's rotation speed and tilt angles are adjustable, offering flexibility in experimental setups. The vacuum system, employing a rotary vane mechanical pump, achieves an ultimate vacuum level of 1.0E-1Pa, facilitating precise material feeding through a vacuum funnel and screw feed. Together, these parameters underscore the high-performance capabilities of the furnace, making it a reliable choice for PECVD processes in scientific research and experimentation.
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