Single heating zone rotary graphene preparation PECVD furnace

The single heating zone tube furnace, model O1200-100IT, stands out among graphene preparation equipment by delivering an elevated background vacuum, enhancing product quality. This versatile furnace employs a high-purity quartz tube, boasting a 100mm diameter and a 1500mm length. Within its 440mm chamber, a 400mm heating zone and an additional 200mm constant temperature zone head allow for meticulous temperature control ranging from 0 to 1100°C with an accuracy of ±1°C.

Operational parameters are conveniently managed through a 30 or 50 segment program displayed on an HD full-color LCD touch screen. The system ensures a secure seal with a 304 stainless steel vacuum flange, operating on AC 220V at 50/60Hz to provide a stable power supply. The RF output system, with adjustable power up to 500W and a working frequency of 13.56MHz, boasts remarkable stability (≤2W) and efficient power management. Safety features such as DC overcurrent protection, power amplifier over-temperature protection, and reflected power protection are integrated. Efficient cooling is achieved through forced air cooling.

The glow zone, created under an argon (Ar) atmosphere, utilizes a radio frequency power supply and coil to evenly fill the furnace tube. The gas delivery system, equipped with a four-channel mass flowmeter, ensures precise control for gases (H2, CH4, N2, Ar). The exhaust system, featuring a turbomolecular pump and a two-stage rotary vane pump, swiftly reaches a vacuum of 5×10E-3Pa within 30 minutes. The system is responsive, with accurate measurement maintained by a compound vacuum gauge.

This tube furnace system includes a rotating and tilting device, offering a speed range of 0-20rpm and tilt angles of 0-15°. An automatic feeding and collection system enhances overall efficiency and ease of use, making material handling seamless. These features collectively position the O1200-100IT as an advanced and user-friendly solution for continuous production, ensuring uniform growth on particle samples and significantly improving reaction efficiency in graphene preparation processes.

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