Roll to roll PECVD graphene preparation equipment
Roll to roll PECVD graphene preparation equipment for continuous production of flexible transparent electrodes，Roll to roll PEVCD is a roll-to-roll tubular furnace system for graphene preparation. The equipment consists of coil to coil copper foil rewinding and placing sealing device, 1200°C tube furnace with three temperature zones and vacuum unit. It can be used for large-scale growth of high quality graphene and other two-dimensional materials
Product Description
The Roll to Roll PEVCD system, identified as model OTF-1200X-III-PE300-RR, presents a comprehensive solution for efficient thin-film deposition across various film electronics applications. This versatile system finds application in computer and cellphone screens, ultra-light flexible solar cells, and emerging luminescent devices. Equipped with a 1000W plasma source featuring adjustable output power ranging from 50 to 1000W with a precision of ±1%, the system operates seamlessly with an RF rate of 13.56MHz, ensuring stability within ±0.005%. Maintaining a low noise level of ≤55dB, the cooling mechanism employs forced air cooling, requiring an input power of 1KW at AC 220V.
Controlled through a PLC touch screen, the system integrates a three-proton flow meter control system, operating at AC220V and 50Hz with a power consumption of 23W. The precision of the system is upheld at ±1.5% FS, with linear accuracy within ±(0.5-1.5)%F.S. and repeated accuracy at ±0.2%F.S. The flow range spans diverse gas types, accommodating 1 to 50 SCCM (Methane calibration), 1 to 200 SCCM (Hydrogen calibration), and 1~200 SCCM (Argon calibration). Customization options for gas type calibration are available upon customer request.
The vacuum system utilizes a PCG-800 model for measurement within a range from 3.8E-5 to 1125 torr. Precision is maintained across various ranges, ensuring accurate readings. The low vacuum unit consists of a double-rotating mechanical pump, double-layer vertical oil mist filter, resistance vacuum gauge, and connecting pipe joint, providing efficient suction rates and reliable vacuum conditions. For the crucial process of sealing copper foil in a reel-to-reel configuration, the system incorporates winding and unwinding mechanisms with adjustable speeds, placed within the vacuum chamber at both ends of the tube furnace. This setup ensures copper foil movement under sealed growth conditions, facilitating large-scale preparation. A cooling device is strategically positioned for efficient copper foil cooling.
With an approximate dimension of 2400x800x1250mm and a weight of around 720kg, the system offers optional CE certification for electrical components. The warranty period covers consumables such as heating elements, quartz tubes, and sample crucibles, with considerations for exceptions related to damage caused by corrosive and acidic gases.
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