Plasma sputtering coater with a transposition and rotation sample stage
This type of plasma sputtering machine adopts two-pole sputtering method, which is widely used for SEM sample preparation or metal coating test. Using low-temperature plasma sputtering process, there is no high temperature during the coating process, and it is not easy to produce thermal damage.
Product Description
The plasma sputtering machine described here employs a two-pole sputtering method, widely utilized for SEM sample preparation and metal coating tests. Utilizing a low-temperature plasma sputtering process, this machine ensures a coating procedure devoid of high temperatures, minimizing the risk of thermal damage. Operating under a PLC control system with an intuitive touch screen interface, the equipment is user-friendly and efficient. The transposition autorotating sample stage facilitates easy one-key transposition, allowing users to freely switch between two target positions. Furthermore, the rotating capability of the sample stage enhances coating uniformity.
Additionally, users have the option to incorporate a crystal oscillator-type film thickness meter, providing real-time monitoring to enhance coating accuracy. Compact and aesthetically pleasing, this plasma sputtering coater is a powerful tool for laboratory coating tests. Specifically, the PSP180G-1TA-SWR is a precision sputtering system designed with technical parameters catering to diverse deposition requirements. Its sample stage accommodates samples with a diameter of φ60mm, offering automatic switching between two target positions. The system features a 2"x1 DC sputtering head within a high-purity quartz chamber measuring φ180mm x 150mm. Vacuum generation relies on a rotary vane pump, achieving an ultimate vacuum level of 1.0E-1Pa. The vacuum interface is equipped with a secure KF16 vacuum flange, and gas inlet is facilitated through a φ 6.35 ferrule connector for compatibility with various gas sources.
Operating on AC 220V 50Hz, the system consumes 1.5KW of power, increasing to 2KW when incorporating rotating heating. These technical specifications collectively define the capabilities and design of the PSP180G-1TA-SWR, establishing it as a versatile and reliable tool for precision sputtering processes across a range of research and industrial applications.
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