Perovskite solar cell glove box
This versatile equipment is designed for the preparation of uniform thin film materials, including multi-component, multilayer composite dense metal/non-metal, metal oxide/nitride/nitrogen oxide, non-metal oxide/nitride/nitrogen oxide, and more. It can accommodate both single-component and multi-component target materials, including magnetic materials, whether they are metal/non-metal or metal/non-metal compounds. Notably, this system allows for in-situ annealing of samples at the thin film deposition site within the vacuum chamber. Furthermore, it supports post-deposition processes like selenization and sulfurization. Its applications span across various scientific disciplines, including materials science, physics, chemistry, microelectronics, optoelectronics, energy research, catalysis, nanotechnology, and more.
Product Description
The system comprises several key components, including a sample injection room, sulfurization/selenization room, two sputtering chambers (with 3 targets and 4 targets, respectively), sputtering control, heating, vacuum measurement, pumping, sample transfer control, and atmosphere control systems. It also incorporates a water circulation refrigeration system, electronic controls, and computer/touch screen program control.
Notably, the system features a robotic arm that facilitates sample movement within the vacuum environment, enabling swift transfer between chambers with vacuum levels restored within 15 minutes after transfers. The two sputtering chambers allow for independent co-sputtering of 3 or 4 target positions, ensuring no interference or material contamination between targets. Additionally, the system includes automatic protection mechanisms, including safeguards against steam erosion in the sulfurization/selenization furnace exhaust inlet.
All chamber materials are constructed from high-quality stainless steel, with argon arc welding and surface polishing for durability and performance.
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