PECVD tube furnace with roll to roll system
This machine is not only used in the continuous heat treatment process of wire rod, such as the preparation of carbon fiber, the modification of alloy and other materials wire rod, but also used for the continuous growth of graphene on the coil.
Product Description
The roll-to-roll PECVD tube furnace stands as a versatile and advanced device designed for plasma-enhanced chemical vapor deposition processes. Its applications span the continuous heat treatment of wire rods, including the preparation of carbon fiber and modification of alloy and other materials, as well as the continuous growth of graphene on coils. Comprising five essential components - a roll-to-roll movement system, a 1200℃ 2-heating-zone open tube furnace, a PE plasma enhancement system, a vacuum system, and a three-channel mass flowmeter gas mixer system - this integrated machine operates seamlessly in vacuum or atmosphere protection environments.
The instrument's roll-to-roll movement system allows for adjustable winding speeds from 1 to 400mm/min, incorporating feedback adjustment mechanisms to automatically correct speed deviations, ensuring sample speed stability and experimental accuracy. Operating on AC220V at 50Hz, the furnace provides a maximum power of 3KW. The dual-zone heating system, each segment spanning 200mm, facilitates precise temperature control up to 1200°C with an accuracy of ±1°C. Temperature regulation is managed by an AI-PID system with a 30-stage process curve, offering versatility through the storage of multiple profiles. The furnace tube, crucial for controlled conditions, is constructed from high-purity quartz, equipped with a stainless steel vacuum flange for secure sealing.
Accurate vacuum measurements are facilitated by a resistance gauge, and the system accommodates non-corrosive gases like hydrogen, nitrogen, argon, and oxygen. The vacuum system, featuring a bipolar rotary vane vacuum pump, achieves an ultimate vacuum of 10^-1Pa. Gas flow is meticulously controlled by a three-channel mass flowmeter, ensuring precision through stainless steel needle valves. The gas channels include pathways for argon, hydrogen, and methane, with a pressure range of 0.05~0.3MPa. Flow control remains within ±1.5%, complemented by a 750mL mixing tank with 304 stainless steel components and 6.35mm bite-type joint pipe interfaces.
Power supply is provided at AC220V, 50Hz, with the RF power supply delivering an output power of 500W and an accuracy level of ±1%. Operating at 13.56MHz, the RF system maintains stability with fluctuations within ±0.005%. The water cooling method efficiently manages heat generated during operation, enhancing the overall efficiency and reliability of the equipment for roll-to-roll PECVD processes.
Disclaimer: The information presented on this website, including product images, product descriptions, and technical parameters, serves as a reference guide. Please note that due to potential delays in updates, discrepancies may exist between the content displayed here and the current product status. We encourage you to reach out to our dedicated sales team to verify the most up-to-date details. It is important to understand that the information provided on this site does not constitute a formal offer or commitment, and our company reserves the right to periodically enhance and amend website information without prior notice. We appreciate your understanding in this regard.