PE-HPCVD (Plasma Enhanced Hybrid Physical Chemical Vapor Deposition) tube furnace
This product is a 1200℃ plasma enhanced hybrid physical chemical vapor deposition (HPCVD) dual heating zone rotary tube furnace system. The equipment includes a dual heating zone tube furnace, a set of tungsten filament evaporation source, a set of plasma generator and a set of mass flowmeter system.
Product Description
The Two Heating Zone Tube Furnace, model O1200-50IIT, operates on the principle of evaporating reactants at the gas inlet end through an evaporation source, transporting them into the tube furnace's heating zone via airflow, and conducting Chemical Vapor Deposition (CVD) reactions. This furnace, with a high-purity quartz tube measuring 50mm in diameter and 1200mm in length, is specifically designed for the heat treatment of inorganic composite powder and achieving uniform surface coatings, as exemplified in the preparation of Li-Ion battery cathode powders with conductive coatings.
Functioning within a temperature range of 0 to 1100°C, the furnace provides precise temperature control with an accuracy of ±1°C. Its dual heating zones, each spanning 200mm, contribute to enhanced temperature management. The temperature control system, equipped with 30 or 50 programming segments, is accessible through a user-friendly full-color HD LCD touch screen. Ensuring a controlled environment is a 304 stainless steel vacuum flange, securing the furnace's sealing mechanism. The system is powered by AC 220V at 50/60Hz, with a total power rating of 2.5kW.
The RF output system, capable of a power range from 0 to 500W, operates at a frequency of 13.56MHz, with impressive power stability (≤2W) and low reflected power. The power supply system exhibits high efficiency, power factor, and accommodates single-phase AC supply. Various control modes, including internal control, PLC analog quantity, and RS232/485 communication, offer flexibility. Safety features such as DC overcurrent protection, power amplifier over-temperature protection, and reflected power protection are incorporated, with cooling achieved through forced air cooling.
In the glow zone, established under argon (Ar) using the radio frequency power supply and coil, the furnace tube is evenly filled. The evaporation boat, operating at 1300°C, features a tungsten wire basket or an optional tapered alumina crucible. The gas delivery system, equipped with a four-channel mass flowmeter, precisely controls gases such as H2, CH4, N2, and Ar. The exhaust system, including a turbomolecular pump and a two-stage rotary vane pump, achieves a swift vacuum reaching 5×10E-3Pa in 30 minutes. Vacuum conditions are accurately monitored through a compound vacuum gauge. This comprehensive system is optimized for advanced CVD processes, ensuring efficiency and precision in material treatments and depositions.
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