Organic Evaporation Coating Furnace

1200X-RTP-II is a two heating zone rapid thermal processing  furnace with 11" I.D.quartz tube. It is designed for PVD or CSS (Close Spaced Sublimation) film coating up to 3" diameter or 2"x2" square. The furnace is heated by two group of halogen heaters (Top and Bottom) separately with max. 20ºC/s heating rate. Two 30 segment precision temperature controllers are built in with +/-1ºC accuracy. RS485 port and control software are included to allow for the operation of furnace and temperature profile logging via PC.  It is excellent tool to research new generation thin film for solar cell, such as CdTe, Sufide and Perovskite solar cell The Organic Evaporation Coating Furnace, specifically designed with two zones for CSS (Close-Spaced Sublimation) applications, comes with a set of detailed specifications. The furnace and its components are integrated into a mobile aluminum alloy frame, which includes two temperature controllers and two-channel gas flow meters. The chamber itself is constructed from high-purity fused quartz tube, with dimensions of 11" OD/10.8" ID x 9" H. The vacuum flanges are made of Stainless Steel 316, featuring a top flange with one KFD-25 vacuum port and one gas outlet (1/4" pipe required) that can be manually adjusted to load and unload substrates and evaporated materials conveniently. The bottom flange includes one KFD-25 vacuum port with one gas inlet (1/4" pipe required) equipped with needle valves. These flanges are sealed by double silicone o-rings, capable of achieving a maximum vacuum pressure of 10E-2 Torr with a quality mechanical pump and 10E-5 Torr with a molecular pump (vacuum pump not included). Additionally, a digital vacuum gauge is installed on the top flange, and an optional precision anti-corrosion digital vacuum gauge is available at extra cost. The gas flow meters are equipped with a gas mixer and two float-meters, allowing for adjustable measurement ranges of 16 - 160 mL/m and 500 - 5000 mL/m (for purging purposes). Heating elements are controlled independently by two heaters, offering a manual adjustable gap from 2 - 30 mm. The heating elements consist of 20 halogen lamps, ensuring rapid thermal processing. These heaters are made of stainless steel with a water-cooled jacket to minimize heat radiation and enable fast cooling. A 5" dia. circular wafer holder is integrated into the top heater for substrate placement. Additionally, a set of high thermal-conductive AlN plates (5" Dia. x 0.5mm Thick) is included to ensure uniform heating. The system comes with a 16L/min recirculating water chiller to save water resources. The temperature control system comprises two precision digital temperature controllers with 30 segments programmability, enabling independent control of the top and bottom heaters. Each controller features PID auto-tune functionality to prevent heater overshooting and an alarm function to avoid overheating and thermal couple damage. The maximum temperature achievable for each heater is <= 800ºC, with a maximum temperature difference between the two heaters of <= 300ºC, depending on the spacing between them. The heating and cooling rates are impressive, with a heating rate exceeding 8ºC/s when using a single heater and a cooling rate of over 10ºC/s (600 - 100ºC) at maximum. Two K-type thermal couples are installed on the top and bottom heaters separately for accurate temperature measurement. The system operates on a working voltage of 208 - 240VAC, single phase, with a 20A air breaker. The power requirement totals 2200W (1100W for each heater). It comes with a one-year limited warranty and lifetime support. The dimensions of the furnace are 1085mm L x 680mm W x 1710mm H.