Organic and inorganic evaporation coater
Organic and inorganic evaporation coater is used in the growth of thin-film solar cell, research of ELOEL molecular organic electroluminescent devices thin films. It can be widely used in small amount production and on the scientific research on film materials by universities and research institutes.
Product Description
The Organic and Inorganic Evaporation Coater is designed with a linear structure, featuring two interconnected organic material growth chambers, each approximately Φ450×H750. The unique configuration includes a dedicated interface for seamless integration with a glove box, allowing substrate transfer between two independent film preparation systems. The first growth chamber encompasses essential components such as a vacuum chamber assembly, organic evaporation source, thermal resistance evaporation boat, sample transfer device, sample platform, film thickness monitor, vacuum chamber lighting device, and a baking device.
The dual D-shaped vacuum chambers house a comprehensive vacuum system, incorporating Japanese cryopumps, oil-free vortex dry pumps, electromagnetic valves, compound digital-displayed vacuum measurement gauges, and meters, ensuring an ultimate pressure of ≤2.0×10-5 Pa. The system exhibits an impressive vacuum recovery time of 1×10-4 Pa in just 40 minutes. Within vacuum chamber 1, an electric magnetic coupling sample transfer device utilizes a magnetic coupling line motion delivery system, driven by a stepper motor and remotely controlled for forward and backward movement. The organic evaporation capability in this chamber is supported by nine OEL sublimation evaporation sources, offering versatility in operation temperatures from room temperature to 800℃ and two sources reaching 1000℃. Vacuum chamber 2 mirrors the setup of chamber 1, housing six similar OEL sublimation evaporation sources.
The coater incorporates two heat-resistant evaporation boats, a digital heat-resistant evaporation power supply with fine adjustment capabilities, aluminum-coated special-purpose box evaporation boats, metal evaporation boats, and evaporation source baffles. The film thickness monitor provides precision with a non-uniformity resolution ratio of 0.0133Å/measure and a velocity resolution ratio of 0.0133 angstrom per second. Operating at a precision of 0.03HZ/measure, it can measure 10 times per second, delivering reliable and accurate data. LED lighting within the vacuum chamber ensures visibility and prevents film coating contamination. The sample stage, accommodating substrates of 100×100mm or 50×50mm, offers power-driven lifting, rotatable motion, and an adjustable rotation speed ranging from 0 to 30rpm, providing flexibility for diverse coating applications.
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