Multi-function coating machine: Plasma Sputtering & Thermal evaporating & Carbon Coating

The PEC250G-HV multi-function coating machine is a versatile instrument designed to facilitate plasma sputtering, thermal evaporation, and carbon evaporation processes in a laboratory setting. Its adaptable nature is further enhanced by the ability to conduct various ion treatments under the protection of high-purity argon. The device boasts a φ250x340mm vacuum chamber, incorporating evaporated glass isolation covers (φ88x150mm) with side opening holes for specific processes. With the flexibility to switch between functions by changing the function kit, this machine is particularly well-suited for efficiently producing SEM samples.
 

Equipped with both a mechanical pump and a molecular pump, the PEC250G-HV accommodates a range of vacuum requirements, including high vacuum conditions. This dual-pump configuration not only enhances versatility but also contributes to the quality improvement of the coating. Operating on a stable AC 220V 50Hz power supply, the machine features distinct coating sets for plasma sputtering, thermal evaporation, and carbon evaporation.
 

The Plasma Sputtering Set employs a sputtering voltage of 1600V, with a maximum current of 50mA, and operates under a working vacuum range of 10Pa~20Pa, utilizing high-purity argon as the working atmosphere. The Thermal Evaporation Coating Set, equipped with two evaporation sources capable of a maximum current of 100A, operates under a low working vacuum of 10^-3Pa without the need for additional gas. The Carbon Evaporation Set utilizes carbon rod evaporation with a maximum current of 160A, working under a vacuum of 10^-3Pa without requiring specific gas.

The vacuum system, denoted as GZK103-A, integrates a turbomolecular pump for molecular pumping with a rate of 600L/S, accompanied by a two-stage rotary vane pump with a rate of 1.1L/S. This combination ensures efficient pumping performance, achieving a vacuum of 5×10E-3Pa within 30 minutes. The ultimate vacuum achieved is 5×10E-4Pa, supported by KF40 and KF16 ports for exhaust and intake interfaces. Vacuum measurements are reliably conducted through a compound vacuum gauge, providing accuracy throughout the coating processes. The PEC250G-HV stands as a comprehensive and adaptable solution for diverse coating applications in laboratory environments.



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