MSP180G-PST Planetary single target magnetron sputtering coater
This equipment is a desktop planetary single-target magnetron coater. The lower half of the cavity is made of stainless steel and the upper part is made of high-purity quartz. It has good vacuum performance and can accommodate complex sample stages.
Product Description
Presenting the MSP180G-PST (Planetary Sample Stage) Single Target Magnetron Sputtering Coater, a desktop-level equipment designed for precision thin-film deposition, offering a versatile and compact solution. With reduced installation site requirements, this coater features a φ50mm x4 sample stage that adjusts revolution speed from 0-10rpm, maintaining a 1:5 revolution-to-rotation speed ratio. The 2-inch magnetron sputtering target, housed in a Φ180mm x 100mm high-purity quartz vacuum chamber, ensures omnidirectional visibility through the observation window, with a removable top cover for easy access.
Equipped with a DC power supply capable of sputtering metal and other conductive materials, this coater's vacuum system integrates a two-stage rotary vane pump and a turbomolecular pump. The pumping interfaces of KF16 and KF40, along with vacuum measurement via a resistance gauge and ionization gauge, contribute to an ultimate vacuum capability of 1.0E-3Pa. Operating on AC 220V 50/60Hz power, the coater delivers a maximum DC power supply output of 300W.
Featuring a compact design measuring 500mm x 320mm x 620mm and a total power consumption of 2kW, this equipment is tailored for various coating tests. Its user-friendly structure and functionality make it an ideal choice for precise thin-film deposition processes. As updates and enhancements may occur, we recommend reaching out to our sales team for the latest information, understanding that the details provided here serve as a reference and are subject to change without prior notice.
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