Magnetron sputtering/vacuum evaporation composite coating equipment MSE300S-DC

The Magnetron Sputtering/Vacuum Evaporation Composite Coating Equipment, known as MSE300S-DC, employs a sophisticated process involving magnetron sputtering cathode glow discharge for target atom sputtering, ionization, and subsequent deposition on substrates. Simultaneously, resistance heating melts metal plating materials in a vacuum, allowing vaporization and deposition on substrates. This dual-coating mechanism enhances the versatility and functionality of the equipment, making it ideal for metallizing plastic surfaces like mobile phone cases and depositing non-conductive and electromagnetic shielding films.
 

The equipment, equipped with a plasma processing device, high-efficiency magnetron sputtering cathode, and resistance evaporation device, offers notable advantages. Its deposition rate is rapid, ensuring a fine and compact coating with high adhesion, surface finish, uniformity, and consistency. The machine facilitates fully automatic control of the coating process, accommodating large loads with reliable operation, high qualification rates, low production costs, and environmental sustainability.
 

Specifically designated as MSE300S-DC, this composite coating equipment presents detailed technical specifications. The sample stage, with a Φ185mm size, boasts precise temperature control (±1℃) and an adjustable rotation speed from 1 to 20rpm. The sputter current range is 2~20mA, accompanied by a sputter voltage of 1000V. Utilizing a Tungsten wire basket as the evaporation source, it reaches a maximum temperature of 1700℃, incorporating a 30-segment lifting and lowering temperature program for precise control.
 

The vacuum chamber, constructed from stainless steel with dimensions of φ300mm × 300mm, adopts a top-over-open design and features a φ100mm watch window. The film thickness monitor ensures accurate measurements with a resolution of 0.0136Å (for aluminum) and an accuracy of ±0.5%. Operating in a temperature range of 0-50℃ and humidity level of 5%-85% RH, the equipment accommodates various process conditions with exceptional reliability.
 

The vacuum system, featuring the GZK103-A model, a 600 molecular pump, and a rotary vane pump, achieves an ultimate vacuum of 1.0E-5Pa. The pumping performance allows the vacuum to reach 1.0E-3Pa within 20 minutes. Additional features include a one-year warranty, lifetime technical support, and optional accessories such as gold, indium, silver, and platinum targets. This comprehensive system represents a cutting-edge solution for advanced composite coating applications.

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