Laboratory Flexible Metal Foil Electrode Preparation 1200 Celcius Single/Multi Heating Zone Double Tube Slide CVD System
The model "O1200-100IT-S3ZD" is designed for CVD film preparation and features a horizontal structure. This system meets TUV certification standards and is offered under the brand. Its specifications include an outer diameter of 100mm and a heating zone with dimensions of 400mm. The product is packaged in a standard plywood wooden box for transport.
Product Description
The 1200°C Double Tube Single/Multi-zone Slide CVD System stands as an innovative laboratory apparatus meticulously crafted for the nuanced demands of flexible metal foil electrode preparation. Engineered to operate at a maximum temperature of 1200°C, this system employs quartz tubes with an inner diameter of Φ80mm and an outer diameter of Φ100mm, ensuring a robust and controlled environment for intricate laboratory processes.
A distinguishing feature of this system lies in its versatile sliding mechanisms, offering both manual and auto-programmable control. Temperature regulation is achieved through PID programmable control with 30-step curves, boasting an exceptional accuracy of ±1°C. The double tube configuration enhances functionality, incorporating a double flange extensible multi-function double clamp connection. This unique design allows independent control of the inner and outer tubes, optimizing precision in vacuum and gas flow management.
Gas control is seamlessly orchestrated by Mass Flow Controllers with three gas pathways, providing a dynamic flow speed range adjustable from 0 to 500sccm, or customizable with an impressive accuracy of ±1%F.S and a rapid response time of ≤4 seconds. The operational environment temperature spans from 5°C to 45°C, while the working pressure exhibits an inlet range of 0.05-0.3Mpa. The vacuum capabilities of the system are expansive, ranging from 10Pa to 100Pa and 1x10-3Pa to 1x10-1Pa.
To ensure efficient vacuum operations, a double-stage mechanical pump takes charge, delivering a vacuum level of 3x10-1Pa and a pumping speed of 4L/S. Complementing this, a turbo pump set contributes to the system's high-performance standards, achieving a vacuum of 5x10-6Pa and a pumping speed of 1600L/S.
The system, with outer dimensions measuring 530×1440×750mm and a weight of 240Kg, manifests as a versatile and robust solution. It is available in three distinct model variations catering to diverse heating zone and constant zone length requirements: O1200-100IT-S3ZD (Single Heating Zone), O1200-100IIT-S3ZD (Double Heating Zone), and O1200-100IIIT-S3ZT (Three Heating Zones).
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