Laboratory 1200°C CVD Tube Furnace with 4 Channel MFC Gas Mixer and Vacuum Pump O1200-60IT-4Z10V
O1200-60IT-4Z10V is a CE certified splittable single zone tube furnace with 60mm diameter quartz tube, mechanical vacuum pump and four channel gas flowing system. It can achieve a maximum vacuum up to 10-2 torr and mix 1-4 types of gases for CVD or diffusion.It is widely used for laboratory thin film preparation
Product Description
The O1200-60IT-4Z10V model stands out with its cutting-edge design, featuring an intuitive LCD touch panel for seamless control and monitoring of its versatile functions. With a maximum limiting temperature of 1200℃, this system excels in efficient operation, maintaining optimal performance up to temperatures not exceeding 1100℃. The adjustable heating rate, ranging from 0-20℃/min, ensures precise temperature control throughout diverse processes.
The 440mm heating zone, coupled with an additional 200mm constant temperature zone, caters to specific requirements. The OD60*1000mm quartz tube, with an impressive temperature accuracy of ±1℃, houses an Fe-Cr-Al alloy heating element supported by molybdenum, complemented by a K-type thermocouple for meticulous temperature measurement. Cooling efficiency is enhanced through a double-layer structure with fan cooling.
Advanced temperature control is facilitated by a 30-step programmable PID control system, while the alumina fiber chamber material ensures durability. The system incorporates over-temperature and over-current alarm functions, prioritizing safe operation. A stainless steel sealing flange adds robustness, and the option to include a mechanical rotary vacuum pump enhances vacuum capabilities. Air cooling optimizes performance, and the stainless steel bellows in the connection pipe, along with a manual flap valve, enable controlled gas flow.
The four-way gas mixer guarantees high accuracy, with a range of ±2% F.S., repeat accuracy of ±0.2% FS, and linear precision within ±1% F.S. Operating under working pressures from -0.1MPa to 0.15MPa, this system is powered by AC220V, 50Hz, making it a reliable solution for diverse applications demanding precise temperature control and efficient gas flow management.
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