Laboraotry mini pecvd furnace with compact tube furnace,rf generator and gas mixer-O1200-50IS-PECVD
O1200-50IS-PECVD is a CE certified splittable single zone tube furnace with 60mm diameter quartz tube, mechanical vacuum pump and four channel gas flowing system and a 13.56MHz rf generator.It can achieve a maximum vacuum up to 10-2 torr and mix 1-4 types of gases for CVD or diffusion.It is widely used for laboratory thin film preparation
Product Description
The O1200-50IS-PECVD model stands out with its advanced features tailored for precise and stable operations. Operating at an RF frequency of 13.56 MHz with an exceptional stability of 0.005%, it offers an adjustable RF output power ranging from 5 to 300W, ensuring remarkable stability at ±1%. The RF output port, designed as 50 Ω with an N-type female connector, includes an automatic matching process for added convenience. Monitoring and control are made easy through the LED digital gauge.
With a maximum limiting temperature of 1200℃ and a recommended working temperature not exceeding 1100℃, this system allows for versatile heating rates within the range of 0-20℃/min. The 200mm heating zone, complemented by an 80mm constant temperature zone, provides flexibility for various applications. The OD50*1000mm quartz tube ensures temperature accuracy of ±1℃, utilizing an Fe-Cr-Al alloy heating element with molybdenum reinforcement and a K-type thermocouple for precise temperature measurements. The double-layer structure with fan cooling and the alumina fiber chamber material contribute to efficient cooling.
The vacuum system, incorporating a mechanical rotary vacuum pump and a turbo pump combined with a rotary vacuum pump, achieves an impressive vacuum range from 10-2 Torr to 10-5 Torr. Air cooling, stainless steel bellows in the connection pipe, and a manual flap valve enhance the cooling process. The four-way gas mixer ensures high accuracy with a range of ±2% F.S., repeat accuracy of ±0.2% FS, and linear precision within ±1% F.S. Operating under working pressures from -0.1MPa to 0.15MPa, the system is powered by AC220V, 50Hz, making it a reliable and precise tool for various applications demanding controlled temperature and gas flow.
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