Hot cathode direct current plasma chemical vapor deposition equipment (DCCVD)
The composition area and basic characteristics of hot cathode glow discharge in the Hot Cathode DC Plasma Chemical Vapor Deposition equipment, referred to as DCCVD, reveal distinct zones along the axis from the cathode to the anode. These zones include the cathode glow layer, Faraday dark zone, positive column glow plasma ball, and anode glow layer. The cathode glow layer, a thin light-emitting layer close to the cathode, is crucial for the glow discharge process, hosting significant wave discharges. The Faraday dark zone acts as a transition between the cathode and positive column zones, presenting a dark area without light emission due to electrons losing energy. The positive column area features a glow plasma ball, the most conspicuous position in the glow discharge, emitting slightly darker light in the anode glow layer compared to the bright positive column area.
Product Description
DCCVD's hot cathode glow discharge distinguishes itself with high gas pressure and current density, setting it apart from conventional cold cathode glow discharge systems. The discharge exhibits a unique distribution of glow intensity and brightness, covering the entire cathode surface. As the discharge current increases, the voltage rises, and the electron emission involves both thermal emission and the γ process, with bias determined by the cathode temperature. The cathode drop zone, vital for maintaining the glow discharge, generates significant wave discharges with a thin thickness and high potential drop. The current density of hot cathode glow discharge surpasses its cold cathode counterpart.
DCCVD's system features a stainless steel water-cooled interlayer deposition chamber designed for safe and efficient operation. Its open cavity design facilitates easy access for maintenance and cleaning tasks, and multiple observation windows provide visibility during operation. The vacuum system, with a mechanical pump, achieves an ultimate vacuum level of 0.1 to 1Pa and rapid pump-down time. The gas distribution system, equipped with five gas sources and mass flow controllers, maintains optimal conditions.
A water cooling system ensures proper operating temperatures, and adjustable performance parameters, including anode and cathode temperatures, operating voltage, and current, ensure precision. The comprehensive control system manages various aspects, and the electrode design with a copper anode and a replaceable molybdenum cathode prevents carbon deposition. The adjustable cathode-anode distance with real-time distance display adds to the precision and effectiveness of the system.
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