High vacuum plasma sputter & thermal evaporation two-in-one coating machine
The plasma sputtering and evaporation two-in-one coating machine is equipped with DC sputtering target and thermal evaporation assembly, which can not only be used for metal film plating by plasma sputtering, but also obtain carbon or other metal elemental films by evaporation.
Product Description
The vacuum chamber of this coating machine is meticulously crafted from 304 stainless steel, ensuring durability and offering a completely visible coating process. Equipped with a two-stage rotary vane vacuum pump, this instrument efficiently achieves a vacuum degree of 1.0E-3Pa and an ultimate vacuum of 1.0E-5Pa, meeting the stringent vacuum requirements of evaporation coating experiments and diode sputtering experiments. Its compact size not only conserves space but also makes it suitable for placement on a test bench, providing versatility and cost-effectiveness. The instrument's multifunctionality caters to various applications, making it an ideal choice for major universities and research institutions.
The High Vacuum Plasma Sputter & Thermal Evaporation two-in-one coating machine, identified as EVS180S-HV, is designed with a comprehensive set of technical specifications to accommodate a diverse range of coating processes. Operating on an AC220V, 60Hz supply voltage, the machine boasts a maximum power rating of 1200W. The sample stage, with a diameter of φ65mm, allows for adjustable distances from the evaporation source within a range of 60mm to 100mm. The vacuum chamber, constructed from durable 304 stainless steel, features outer dimensions of φ168mm and inner dimensions of φ160mm x 210mm. Capable of reaching a maximum temperature of 1700℃, the chamber is equipped with a B-type thermocouple for precise temperature measurement. Vacuum pressure is closely monitored by an electronic vacuum gauge, ensuring meticulous control throughout the coating process.
The vacuum system incorporates an oil-free backing pump with a pumping speed of 30L/min and a secondary pump with a pumping speed of 90L/s. The vacuum interfaces are equipped with KF40 connections, while the intake port utilizes a 1/4 card sleeve connector for convenient gas intake. The overall dimensions of the coating machine, measuring 500mm x 350mm x 400mm, underscore its compact and versatile nature, suitable for a wide array of research and industrial coating applications.
Disclaimer: The information presented on this website, including product images, product descriptions, and technical parameters, serves as a reference guide. Please note that due to potential delays in updates, discrepancies may exist between the content displayed here and the current product status. We encourage you to reach out to our dedicated sales team to verify the most up-to-date details. It is important to understand that the information provided on this site does not constitute a formal offer or commitment, and our company reserves the right to periodically enhance and amend website information without prior notice. We appreciate your understanding in this regard.