High vacuum mini CVD tube furnace
This set CVD equipment is a miniaturized CVD system, the core of which is a mini tube furnace, which uses resistance wire heating, and the maximum temperature of the equipment can reach 1200℃. The instrument also contains a three-channel float flow meter and a molecular pump set, which respectively constitute the inlet and outlet gas parts of the CVD. There is a digital display vacuum gauge on the right side of the furnace tube to control the vacuum degree and atmosphere environment inside the furnace tube.
Product Description
The High Vacuum Mini CVD Tube Furnace is designed for precision and efficiency in experimental setups. Employing PID intelligent temperature control, the system achieves an impressive temperature control accuracy of ±1℃, enhancing the reliability of experiments. Operating the tube furnace is streamlined with a temperature control meter that allows for the presetting of temperature control curves and facilitates one-button start and stop functionality. This user-friendly approach simplifies experiment operations, saving valuable time for researchers.
Key technical parameters of the furnace include its AC 220V, 50Hz power supply, and a maximum power capacity of 2KW. The single heating zone spans 200mm, with a constant temperature zone head measuring 100mm. The heat-resistant alloy wire serves as the heating element, and temperature measurement is carried out using a K type thermocouple. The furnace can reach temperatures up to 1150℃, and it is recommended to maintain a heating rate of no more than 10℃/min for optimal performance. Temperature control employs an AI-PID control method with a 30-segment process curve, featuring overheat and thermocouple failure protection.
The furnace tube, constructed from high-purity quartz with a φ50mm outer diameter and 450mm length, ensures a stable and controlled environment. Vacuum operations are handled by a mechanical pump with a pumping speed of 1.1L/s and an ultimate vacuum of 5Pa. The gas flow system integrates a three-channel float flowmeter with stainless steel needle valves, providing precise control over a pressure range of 0.05 to 0.3MPa and a flow range of 160 SCCM for air. The gas path, constructed from 304 stainless steel, features 6.35mm ferrule connectors at the pipe interface. The vacuum performance is further enhanced by a turbomolecular pump (GZK103-A) with a pumping rate of 6000L/S, and a two-stage rotary vane pump as the backing pump. The system achieves an overall vacuum performance of 5×10E-3Pa within 30 minutes, with KF40 and KF16 port interfaces for the pumps and exhaust, respectively. Vacuum measurement is facilitated by a compound vacuum gauge, ensuring the system's accuracy and reliability in experimental settings.
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