High vacuum evaporation coater

The instrument can stably evaporate metals and some organics. High-vacuum stainless steel chamber is adopted, which has good sealing performance and excellent vacuum performance. The chamber is equipped with an observation window, so the coating process is visible. Ultimate vacuum 10E-5Pa with molecular pump system, effectively improve the coating quality, and can meet the vacuum environment required for most evaporation coating experiments. The High Vacuum Evaporation Coater is equipped with a set of technical parameters designed for precise and efficient operation. It requires an input power supply of AC 220V, single-phase, and 50Hz. The evaporation process is controlled by a current of 100A and an electrode voltage of 10V. The coater features two evaporation sources, consisting of tungsten filament baskets and tungsten boats. Additionally, it includes evaporator baffles for precise control. The sample holder is positioned at the top, with a diameter of φ65mm, a rotating speed adjustable between 0-20 rpm, and the ability to adjust the distance between the sample holder and the evaporation source as needed. The vacuum chamber is constructed from high-quality 304 stainless steel, with inner wall processing through electrolytic polishing. The chamber's dimensions are approximately φ180mm in diameter and H210mm in height, and it opens from the top. Temperature measurement is facilitated by a B type thermocouple. The coater features a 7-inch touch screen for display and control, allowing for current regulation through touch screen settings within a range of 0~100A. The vacuum requirements can be met by selecting either a rotary vane pump or a molecular pump group, depending on specific needs (additional charges may apply). The extraction interface utilizes KF25, and the inlet interface is a diameter 6mm round hole fine-tuning valve. For precise monitoring, the coater includes a film thickness monitor with an accuracy of 0.1Å, adjustable measurement speeds ranging from 100ms to 1s, and a measurement range of 500,000Å (Aluminum). It is equipped with a standard sensor crystal operating at 6MHz. These technical specifications collectively establish the High Vacuum Evaporation Coater as a reliable and precise tool for a range of thin-film coating applications.