High power program-controlled servo spin coater
The high-power program-controlled servo spin coater features a robust stainless steel casing for enhanced durability and aesthetics compared to plastic or lacquered metal counterparts. Equipped with an industrial-grade 400-watt servo motor system, this spin coater stands out in its category, reaching an impressive maximum of 50,000 rpm/s in rotational acceleration. This exceptional performance guarantees stability and high repeatability in the application of coatings.
Product Description
The spin coater offers advanced program capabilities, allowing users to store up to 100 groups of programs, with each group comprising 100 steps. Each step can be precisely adjusted with an accuracy of 0.1 seconds.
Regarding rotation speed, the spin coater provides a range from 0 to 5,000 rpm, with higher speeds available as an option. To ensure safety when handling heavy or large spin coating tasks, the speed is limited to 5,000 rpm.
For spin coating acceleration, the equipment offers a range from 0 to 10,000 rpm/s, with higher options also available. Safety considerations restrict the acceleration to a maximum of 10,000 rpm/s for heavy or large spin coating applications.
The motor's speed stability error is impressively low, at less than ±1 rpm. Speed adjustments are highly accurate and repeatable, with a precision of 1 rpm.
In terms of process time setting, users can adjust it from 0 to 3,000 seconds per step, with time setting accuracy down to 0.1 seconds.
The spin coater accommodates wafer sizes ranging from 25 pixels to 300mm (12" round crystal) and provides excellent coating uniformity, with deviations of less than ±3% within a 6-inch range (note that measurements exclude a 3mm edge area).
The high-power program-controlled servo spin coater offers several notable advantages. Its compact in-house design reduces its overall footprint, optimizing space utilization. The user-friendly 7" touch screen control panel simplifies operation. Industrial-grade servo motors are incorporated to prevent contaminants like photoresist from entering the motor. Constructed from acid and alkali-resistant stainless steel, the coater's body is durable, corrosion-resistant, and easy to clean. Additionally, the strategic placement of the exhaust and pumping system at the stage's bottom ensures efficient exhaust and uniform spin coating. A transparent, chemically resistant sealing cap effectively isolates photoresist spillage and toxic odors, enhancing safety and control in the work environment.
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