Fully automatic ultrasonic assisted atmosphere heating spin coater
SPC-HUA6 is a compact and versatile spin coater equipped with an ultrasonic nozzle for precise glue application onto substrates. Its high-speed rotation ensures even and efficient coating. It also offers the option for standalone spin coating operations.
Product Description
The SPC-HUA6 features a chamber equipped with heating elements, allowing for post-spin coating baking. It also incorporates a gas path controlled by a 2-way float flowmeter, enabling the introduction of inert gas into the chamber to safeguard the adhesive liquid from ambient air during spin coating. This versatile machine is well-suited for surface coating applications on semiconductor wafers, slides, substrates, ITO conductive glass, and various processes involving plate making. It accommodates crystallizable wafers up to 6 inches in size, offering a maximum rotational speed of 10,000rpm and an acceleration of 5,000rpm. Notable advantages include stable speed, rapid startup, and user-friendly operation, ensuring consistent and uniform coating thickness.
The spin coater comes equipped with several noteworthy features. It utilizes a DC brushless motor, offering precise control through a single-chip microcomputer. The device incorporates a high-definition touch screen interface for intuitive operation. Users can engage in both single-step and multi-step spinning coating processes, with the capacity to store up to five distinct programs, each comprising five sequential steps. A notable design feature includes anti-blocking capabilities to enhance performance. The spin coater boasts an aluminum alloy chamber, ensuring durability and long-term use. Additionally, it offers various auxiliary functions, including ultrasonic, atmospheric, and heating features, making it a versatile tool for spin coating research and experimentation.
The ultrasonic-assisted atmosphere spin coater offers a range of technical parameters tailored to its precise operation. Designed to accommodate 6-inch substrates, it boasts an adjustable rotation speed between 100 and 10,000rpm and rotational acceleration between 100 and 5,000rpm/s, offering flexibility in coating applications. The device supports spinning times of up to 3,000 seconds per cycle and features a chamber with dimensions of φ200mm*90mm.
Operating on a 220V 50Hz power supply with a power consumption of 400W, the spin coater includes a heating temperature control feature with a range of 0-100℃. It comes backed by a 1-year warranty and offers life-long technical support, excluding vulnerable parts.
Additionally, the ultrasonic system within the coater comprises an atomizing head made of titanium alloy, operating at a frequency of 40kHz with a power rating of 130W. The system provides a flow rate of 0.55mL/s and produces particles with a diameter of 25um. The atomizing head type is cone-shaped, weighing 0.3kg. The accompanying ultrasonic power supply has dimensions of 315312135mm and weighs 5kg.
Moreover, the spin coater features a syringe pump with a versatile flow range from 0.001uL/min to 43.349mL/min and a power-down memory function for parameter retention after power cycles. The injector accommodates volumes ranging from 10uL to 1000uL, with syringe capacities spanning 1mL to 60mL. The linear speed can be adjusted within a range of 5um/min to 65um/min, with a resolution of 5um/min. The maximum stroke is 140mm, and the travel resolution is 0.156um, supporting a rated linear thrust greater than 90N. Lastly, the flowmeter offers control for two types of gases with a flow rate spanning 16-160mL/min.
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