Four sources thermal evaporating system with precision temperature controller
Four sources thermal evaporating system is a compact thermal evaporating system with total 4 evaporating source crucibles and precision and programmable temperature control. Four evaporating crucibles could be used to deposit multiple different materials to grow multilayers films one by one in the same chamber atmosphere.
Product Description
The Four Sources Thermal Evaporating System is a versatile solution tailored for coating metallic and organic material films up to 2" in size, offering a wide temperature range from 200 ºC to 1500 ºC (extendable to 1700 ºC with an optional B-type thermocouple). This system excels in laboratories, universities, and research institutes, providing a compact design that optimizes space utilization. Operating with simplicity, it accommodates various materials and is recognized for its efficiency.
Highlighted by a 280 mm O.D.×260 mm I.D.×310 mm Height quartz chamber, the system ensures convenient cleaning and sample loading. Its 2" Dia rotatable evaporating sources contribute to uniform film coatings. The high-temperature coating capability, reaching up to 1700 ºC, is facilitated by tungsten coil heaters and alumina crucibles. Precision temperature control, with 30 programmable segments and +/- 1 ºC accuracy, guarantees optimal performance.
The system achieves a high vacuum level of up to 1.0E-5 Torr through an optional turbopump, complemented by a built-in gas flow port and valve for chamber purge and CVD possibilities. The technical specifications include an input power supply of AC 208 - 240V 50/60 Hz, single phase, with an input power of 1200 W. The system encompasses four Alumina Evaporating Crucibles, each with a 3 mL capacity, operating sequentially rather than simultaneously. Tungsten coil heaters with built-in thermocouples ensure precise temperature control. The digital temperature controller features 30 programmable segments, and an optional B-type thermocouple extends the heating range to 1700℃.
To cater to diverse coating needs, the system allows for rapid coating up to 2000℃ by removing specific components. A rotatable sample stage with a 50 mm diameter and adjustable distance enhances flexibility, rotating at 5 rpm. Vacuum requirements are addressed through a KF25 vacuum port, with the option to achieve a vacuum level of <1E-5 Torr via overnight pumping with an optional Turbomolecular pump. Various vacuum pump options are available, including a Double Stage Rotary Vane Vacuum Pump and a Compact Turbomolecular Vacuum Pump System.
Additional features include a 1/4 tube fitting for chamber purge or forming gas processing and a built-in needle valve for gas flow rate control. The quartz chamber dimensions are O.D.: 280mm (11"), I.D.: 260mm (10.2"), and Length: 310mm (12.2"). With a one-year limited warranty, lifetime support, and a net weight of 80 kg, the Four Sources Thermal Evaporating System stands as a reliable and efficient tool for advanced coating applications.
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