Four sources high vacuum thermal evaporation coater
The equipment is equipped with four sets of tungsten boat evaporation sources and water-cooled copper electrode. Each evaporation source supports a large current of 100A and a heating temperature of 1800℃. It can realize multi-layer coating or mixed coating of multiple materials.
Product Description
The Four-Source High Vacuum Thermal Evaporation Coater is engineered for precise coating applications, featuring a front-opening door vacuum chamber design that enhances versatility and user convenience. With an expanded chamber height of 500mm, the equipment allows for a wider adjustment range between the sample stage and evaporation source, accommodating diverse evaporation needs while preventing sample damage from high evaporation source temperatures. The top sample stage, equipped with rotation, heating, and lifting capabilities, enables integrated and touchscreen-controlled operations, providing a seamless user experience.
The vacuum system employs a two-stage configuration, comprising a two-stage rotary vane pump and a turbo molecular pump, ensuring a clean and oil-free high vacuum environment. The pneumatic valve system, integrated into the automatic control operating system, enables one-button vacuum pumping, non-stop sample handling, and complete shutdown, enhancing operational efficiency. The coater is equipped with four tungsten boat evaporation sources and water-cooled copper electrodes, each supporting a substantial 100A current and heating up to 1800℃. This allows for multi-layer or mixed coating of multiple materials, expanding the coater's versatility.
Featuring a sample stage capable of accommodating up to φ150mm samples with adjustable height, the equipment offers positioning flexibility. The vacuum chamber, constructed from durable 304 stainless steel, incorporates a front door opening mechanism and a front observation window for easy access and process monitoring. Film thickness control is achieved through a crystal oscillator-type measuring instrument, with an option to integrate a multi-channel film thickness controller for added precision. The vacuum system, with a two-stage rotary vane pump and a turbomolecular pump, boasts a compound vacuum gauge for accurate measurement.
Operated through a PLC automatic control system with a user-friendly interface, combining a touch screen and an operation panel, the coater operates on an AC220V, 50Hz power supply. With an overall footprint of 1000mm x 800mm x 1500mm, a total power consumption of 10kW, and a weight of 350kg, this equipment stands as a robust and capable solution for high vacuum evaporation coating applications, offering precise control and automation in a compact design.
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