Film thickness measurement
The film thickness monitor, identified by the product model FTM60, offers several key features. One notable aspect is its ability to connect to a computer, enhancing data integration and analysis capabilities. The machine boasts a user-friendly display interface characterized by simplicity, intuitiveness, and efficient operation. It enables the visual representation of measured film thickness, rate, frequency, and the percentage of PWM control output, facilitating a clear understanding of the equipment's working status. Moreover, this monitor allows users to configure various parameters through software or the display instrument. These parameters include gating time, output mode, rate algorithm, material characteristics, output range, and communication settings. Furthermore, users have the option to export related data to an Excel file, enhancing data management and analysis capabilities.
Product Description
The monitoring module operates on a 5V (± 10%) DC power supply, drawing a maximum current of 400mA. Its technical parameters include a high precision measurement capability, with a frequency resolution of ± 0.03Hz and an impressive film thickness resolution of 0.0136Å for aluminum. While the film thickness accuracy is maintained at ± 0.5%, variations can occur based on process conditions such as sensor position, material stress, temperature, and density.
Users can adjust the measurement speed within a range of 100ms to 1s per measurement. The module has a substantial measuring range of 500,000Å for aluminum and employs a standard 6MHz sensor crystal. Connectivity is achieved through RS-232/485 serial interfaces, with baud rate settings ranging from 1200 to 38400. Analog output is supported with 8-bit resolution and PWM pulse width modulation output, available as an open collector or internal 5V output. Operating in a temperature range of 0-50°C and humidity levels between 5% and 85%, with compact dimensions of 90mm x 50mm x 18mm, the module is suitable for various applications requiring precise film thickness monitoring.
The FTM60 display instrument complements the monitoring module with an input power supply of AC 220V (± 10%) and an output power of DC 5V 3A. Featuring a 12×2 digital tube and LED for clear presentation, the instrument communicates through an RS-485 port with selectable baud rates from 1200 to 38400. Communication parameters include 8 data bits, 1 stop bit, and no parity. Compact in size at 182mm x 65mm x 160mm, the FTM60 display instrument adds versatility to the system by providing essential information in a concise manner.
The FTM probe is designed with compatibility in mind, featuring a 6MHz chip frequency and suitability for Ø14mm chips. Equipped with a CF35 mounting flange, the probe includes a cooling water pipe with Ø3mm diameter (available in lengths of 300mm, 500mm, and 1000mm) and a pneumatic baffle road tube with Ø3mm diameter. Optimal performance requires cooling water pressure below 0.3MPa and compressed air pressure between 0.5MPa and 0.8MPa. Depending on the application, the probe's baking temperature should not exceed 200°C in a water-passing state and 100°C without water passing through the flange. The probe's electrical interface features a BCN socket for seamless connectivity and integration into the system.
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