Dual heads plasma sputtering coater with rotary heating sample stage PSP180G-2TA-RSH
This type of small plasma sputtering coating machine adopts two-stage sputtering method, which is widely used for SEM sample preparation or metal coating experiment. Using low-temperature plasma sputtering process, there is no high temperature during the coating process, and it is not easy to produce thermal damage.
Product Description
This compact plasma sputtering coater integrates a user-friendly PLC control system and a touch screen interface for seamless operation, promoting ease of learning and utilization. Enhanced by a rotatable heating sample stage, the equipment not only ensures uniform coating but also improves film adhesion. Its small size and attractive design make it an ideal choice for laboratory coating experiments.
Equipped with precise technical parameters, this plasma sputtering instrument provides a versatile platform for thin-film deposition processes. The sample stage, measuring 100mm, supports adjustable rotating speeds from 1 to 20rpm and features a heating system with a maximum temperature capability of ≤500℃, offering precise temperature control with an accuracy of ±1℃ through PID temperature control. Utilizing two 2-inch plasma sputtering sources cooled by a water cooling system, the coater's vacuum chamber, constructed from high-purity quartz material, ensures omnidirectional visibility through an observation window. The removable top cover facilitates easy access, while both upper and lower cover materials are composed of 304 stainless steel. The chamber interfaces with a KF16 pumping port and a 1/4 inch ferrule connector for gas intake.
The coater's power configuration includes a DC power supply with a maximum output power of 150W and a sputtering power of 1200V, capable of delivering a maximum sputtering current of 50mA. The vacuum system features a dual-stage rotary vane vacuum pump with a KF16 pumping port and exhaust interface, achieving a pumping rate of 1.1L/s (4m3/h) and an ultimate vacuum level of ≥0.1Pa, as measured by a resistance vacuum gauge. Operating on an AC 220V 50Hz power supply, the coater consumes a total power of 2kW. With a compact design measuring 500mm x 320mm x 470mm and a weight of 30kg, this coater is suitable for a range of research and industrial thin-film deposition applications, offering precise and efficient coating processes.
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