Desktop single target magnetron sputtering coater with film thickness gauge
This equipment is a single-target magnetron coating apparatus, which can be used for the preparation of metal thin films. this Desktop single target magnetron sputtering coater can be used in the fields of electronics, optics, and special ceramic preparation. It can also be used for laboratory SEM sample preparation. This model can be equipped with a film thickness meter, which can monitor film thickness data in real time and provide reliable parameters for the experimental process.
Product Description
Features: Using a quartz vacuum chamber, the coating process is omnidirectionally visible, which is convenient for observation and recording of experiments. The chamber design is convenient and easy to clean, which is very suitable for laboratory use. At the same time, the equipment is equipped with a rotating heating sample stage, which can effectively improve the uniformity of the film and the quality of the film. The whole machine adopts modular design, simple operation logic and intuitive operation interface, which is easy to get started. The desktop single-target magnetron sputtering coater boasts a set of technical parameters optimized for precision and efficiency. The sample stage offers a sizable 100mm size, complemented by variable rotary speeds ranging from 1 to 20 revolutions per minute. It further incorporates a robust heating system capable of achieving temperatures up to 500℃ while maintaining a remarkable temperature control accuracy of ±1℃. The magnetron sputtering head, comprising one 2-inch target, operates with an effective water cooling mechanism. Within the vacuum chamber, measuring φ180mm x 215mm in size, high-purity quartz material ensures a pristine environment for sputtering processes. An omnidirectional visual watch window facilitates easy monitoring, while the top cover is conveniently removable for access. The coater is equipped with a dedicated DC power supply, featuring one set with a maximum output power of ≤300W and an output voltage not exceeding ≤600V, delivering rapid response times of less than 5 milliseconds. Efficient water cooling is facilitated with a tank capacity of 9L and a flow rate of 10L/min. For precise film thickness measurement, a specialized gauge offers an impressive accuracy of 0.1 angstroms, and it is water-cooled to maintain optimal performance. Power supply requirements dictate AC220V at 50Hz, with the entire system consuming a total power of 1kW. These detailed technical specifications collectively define the capabilities and dimensions of the desktop single-target magnetron sputtering coater, ensuring a clear understanding of its features and performance.