Desktop single sputter head magnetron sputtering coater MSP180G-DC

This equipment is a desktop single sputter head magnetron sputtering coating machine. The miniaturized design of the equipment limits the appearance of the equipment to the desktop level, greatly reducing the installation site requirements. The Desktop single sputter head magnetron sputtering coater equipment is equipped with a DC power supply, which can be used for sputtering metal materials and has the characteristics of fast speed and low temperature rise. The desktop single sputter head magnetron sputtering coater is characterized by a comprehensive set of technical parameters that ensure precision and efficiency in its operation. The sample stage features a substantial φ100mm size and offers heating capabilities with a maximum temperature of 500℃, allowing for precise temperature control. Its rotating speed is adjustable within the range of 0 to 20rpm, providing flexibility for various applications. The magnetron sputtering head accommodates one 2-inch target, enabling versatile material deposition. Within the φ180mm x 215mm vacuum chamber, high-purity quartz is used as the chamber material, ensuring a pristine sputtering environment. The chamber is designed with an omnidirectional transparent observation window for convenient monitoring, and the upper cover is removable, facilitating easy access to the chamber. The vacuum system comprises a mechanical pump with a KF16 pumping port, and a molecular pump with a KF40 pumping port. Vacuum measurement is achieved through the combination of a resistance gauge and an ionization gauge, resulting in an ultimate vacuum capability of 1.0E-4Pa. The power supply requirements specify AC 220V at 50/60Hz, and the pumping rate is 1.1L/s for the mechanical pump and an impressive 600L/s for the molecular pump. Power configuration includes a single DC power supply with a maximum output power of 150W. The overall size of the coater measures 550mm x 350mm x 400mm, and it consumes a total power of 2kW. These detailed technical specifications collectively define the capabilities and dimensions of the desktop single sputter head magnetron sputtering coater, offering insight into its features and performance.