Desktop bottom-target magnetron sputtering coater
This equipment is a desktop single-target magnetron sputtering coater. The equipment has been miniaturized and designed to limit the appearance of the equipment to the desktop level, greatly reducing the installation site requirements.
Product Description
Introducing the MSP180S-DC-GU, a compact desktop single-target magnetron sputtering coater designed for precision thin-film deposition. This miniaturized system is thoughtfully engineered to seamlessly integrate into desktop environments, minimizing installation space requirements. The equipment is powered by a DC power supply, making it ideal for the rapid and low-temperature sputtering of metal materials.
The innovative design of the vacuum chamber features a bottom target configuration, optimizing the sputtering process for enhanced efficiency and minimal impurity contamination. The coater's φ100mm sample stage is equipped to reach temperatures up to 500℃, offering versatility for various deposition applications. The adjustable rotation speed, ranging from 0 to 20rpm, ensures uniform coating. Sample installation is convenient with a clamp-type configuration beneath the upper cover of the chamber.
Equipped with two 2-inch magnetron sputtering targets, strategically located in the lower mounting with the chamber's lower flange, this system guarantees efficient and uniform sputtering. The vacuum chamber, constructed from durable SS304, features a front φ60mm observation window for real-time monitoring. Access is facilitated through the top cover, simplifying sample handling.
The vacuum system, incorporating a rotary vane pump with a KF16 pumping interface and a turbomolecular pump with a KF40 interface, ensures reliable and efficient evacuation. Precise vacuum measurement is achieved through a combination of a resistance gauge and an ionization gauge. Operating on AC 220V 50/60Hz power, the coater has a maximum DC power supply output of 300W.
With its compact dimensions of 550mm x 350mm x 400mm and a total power consumption of 2kW, the MSP180S-DC-GU offers a robust solution for thin-film deposition processes, combining space efficiency with high-performance capabilities.
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