![DC/RF Dual-Head High Vacuum 2" Magnetron Plasma Sputtering Coater](/uploads/files/global/products/magnetron_sputter_coating/mnd-134063.jpg "DC/RF Dual-Head High Vacuum 2" Magnetron Plasma Sputtering Coater")
DC/RF Dual-Head High Vacuum 2" Magnetron Plasma Sputtering Coater
VTC-600-2HD is a compact magnetron sputtering system with dual 2" target sources, e.g., one DC source for coating metallic film, and another RF source for coating non-metallic material. A film thickness tracker is included to enable the user to control processing easily.
Product Description
Introducing the VTC-600-2HD, our compact and versatile DC/RF Dual-Head High Vacuum 2" Magnetron Plasma Sputtering Coater, designed to meet the demands of precise coating applications. This innovative system integrates dual 2" target sources, featuring a 500W DC source for coating metallic films and a 300W RF source for non-metallic materials. Its flexibility is enhanced by a film thickness tracker for easy processing control.
Operating on a 220VAC power supply with a frequency of 50/60Hz, single phase, and consuming 2000W of power, this coater is a powerhouse inclusive of the pump. The control box seamlessly manages the two sputtering power sources, with one 2" Magnetron Sputtering Head connected to the RF source and the other to the DC source. The system supports a thickness range of 0.1 - 5 mm for both metallic and non-conductive targets, including backing plates. Customization options cater to specific needs, such as configurations with two DC heads without RF sputtering, two RF heads without DC sputtering, or three RF heads.
The stainless steel vacuum chamber, measuring 300 mm in diameter and 300 mm in height, is equipped with an observation window and a hinged top lid for convenient target exchange. The sample holder accommodates up to 4" wafers, offering adjustable rotation speeds and temperature control for uniform coating. Gas flow is managed by precision digital mass flow controllers, allowing two types of gases with a maximum flow rate of 200 ml/min.
The coater's vacuum pump station boasts a high-speed turbo vacuum pump from Germany and a heavy-duty dual-stage mechanical pump for efficient pumping speed. The standard vacuum level is < 4x10^-5 Torr, with an achievable maximum vacuum level of 10^-6 torr with chamber baking. A Digital Temperature Controlled Recirculating Water Chiller ensures efficient cooling of both magnetron sputtering heads.
Optional features include a Precise Quartz Film Thickness Monitor for monitoring coating thickness and Precision Thin Film & Coating Analysis Systems for post-coating film thickness measurement. The coater's dimensions with the lid closed are 48" × 28" × 32", and with the lid open, they are 48" × 28" × 37". Weighing 200 kg, this system comes with a one-year limited warranty and lifetime support, ensuring reliability and performance. Upgrade your coating capabilities with the VTC-600-2HD.
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