Compact vacuum chamber furnace with water cooling flange 1200X-H8
1200X-H8 is a CE standard vacuum crucible furnace. It is designed for laboratory calcining and annealing semiconductor wafer under vacuum or various protective gas. It equips a 7.5" ID x 13.4"L Quartz tube chamber sitting horizontally. Water-cooled stainless steel vacuum flanges with valves are installed to achieve a vacuum of 10-2 to10-5 Torr through a mechanical or molecular vacuum pump.
Product Description
This equipment operates seamlessly at an input voltage of AC220V and a frequency of 50/60Hz, boasting a design featuring a swing side chamber structure with a water cooling flange. This design enhances its adaptability across diverse applications. The presence of an LCD Touch Panel ensures intuitive control and monitoring. With a maximum limiting temperature of 1150℃ and a recommended working temperature range from Rm to 1100℃, it suggests a heating rate of ≤20℃/min, with 10℃/min as the recommended setting. The chamber, meticulously crafted with a quartz construction measuring Φ200x340mm and a heating zone of Φ190x215mm, ensures a robust and efficient design. Employing Ni-Cr-Al heating wire as the heating element and a K-type thermocouple for temperature monitoring, the equipment boasts an impressive accuracy of +/-0.1℃.
Maintaining temperature uniformity within the range of 300-500℃ with a variance of +/-5℃, the 6L chamber capacity makes it suitable for a diverse array of applications. Temperature control is achieved through digital PID control, offering a "time-temperature" control with 30 programmable steps. Safety features, including over-temperature and over-current alarms, provide an additional layer of protection. The equipment includes a vacuum pump with a pumping speed of 4m3/h and a limited vacuum degree of 6.0*10-2Torr. With the added efficiency of water cooling, providing a cooling rate of 10L/min, it contributes to the overall efficient and reliable operation of the equipment. The specified working voltage for this equipment is AC220V, 50Hz. Collectively, these specifications position it as a versatile and reliable tool, meeting the demands of applications requiring controlled high-temperature and vacuum environments.
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