Compact CVD system with 1200°C tube furnace 3 gas way float flow controller-O1200-50IC-3F
This compact cvd system is composed by a mini tube furnace, a rotary vacuum pump, a 3 gas way float flow controller and a digital vacuum gauge. This compact cvd system is widely used in laboratory thin film preparation, such as MoS2, graphene etc.
Product Description
The O1200-50IC-3F compact CVD system boasts a high-quality tube furnace with a range of exceptional features. The furnace is constructed with high purity ceramic fiber insulation, providing a significant 30% energy-saving advantage and reducing weight by approximately 30% compared to older designs. Its double-layered steel casing, complemented by fan cooling, ensures the furnace surface temperature stays below 50°C, while the stainless steel flange ensures perfect sealing, enhancing overall performance. The chamber size is customizable with options including Φ50x1000mm, Φ60x1000mm, Φ80x1000mm, and Φ100x1000mm to meet specific requirements. The power capacity ranges from 0.8KW to 10KW based on the heating zone length. Operating on AC220V at 50/60Hz, it reaches a maximum temperature of 1200°C for under two hours and maintains a continuous working temperature of 1150°C. The system achieves a maximum heating rate of 20°C per minute.
Temperature control is facilitated through a PID automatic control system with an auto-tune function, offering 30 programmable segments for precise control, and incorporating protection mechanisms against overheating and thermal couple breakage. The digital control panel, user-friendly with LED buttons or an LCD touchscreen, ensures temperature accuracy within +/-1°C. The heating element, crafted from Aludirome, works in tandem with a K-type thermocouple for accurate temperature measurement. The vacuum pump, powered by AC220V at 50Hz, demonstrates efficient performance with features like an oil trap at the inlet and an exhaust filter at the outlet, ensuring a maximum vacuum capability of 10-2 torr.
For precise gas flow control, the system is equipped with a three-way float flow controller, offering customizable ranges of 16 to 160ml/min, 25 to 250ml/min, and 60~600ml/min. Additionally, the O1200-50IC-3F compact CVD system is backed by a one-year limited warranty, covering consumable parts such as thermocouples, door blocks, and heating elements, providing assurance and reliability for its users.
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