Compact 500W RF Generator with Auto Matching Network for RF Sputtering RF500
RF generator is form a complete set of plasma power supply,it is composed by by the rf power source, impedance matching unit and the impedance of power meter It is widely used for RF Sputtering, PECVD Chemical Vapor Deposition,and Reactive-ion Etching and etc.
Product Description
Presenting the RF Generator, a reliable and stable solution operating at 13.56MHz ± 0.005%. With an adjustable output power ranging from 0 to 500W, this generator operates seamlessly in continuous output mode, providing user convenience through its LCD display. The RF output impedance, adopting the N-type female 50Ω configuration, ensures efficient performance, with power stability impressively maintained within a ≤2W range and a maximum reflection power of 200W.
This generator exhibits low levels of harmonic components, measuring less than -50dBc, showcasing its commitment to signal purity. Boasting a rapid response time of 200ms, it offers versatile control options through PLC/RS232/485 interfaces, catering to diverse user preferences. The tube diameter options of Φ50, 60, 80, and 100mm enhance its applicability across various scenarios.
Ensuring optimal operation, the RF Generator employs forced air cooling, effectively managing temperature levels. Compact and powerful, its physical dimensions measure 380x320x450mm, with a gross weight of 30kg. This makes it an ideal choice for applications where a combination of performance and space efficiency is paramount, solidifying its position as a versatile RF generator.
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