Compact 3 Sputter Heads Plasma Sputtering Coater with Rotary Stage PSP180G-3TA-RS
This type of small plasma sputtering coating machine adopts two-stage sputtering method, which is widely used for SEM sample preparation or metal coating experiment. Using low-temperature plasma sputtering process, there is no high temperature during the coating process, and it is not easy to produce thermal damage.
Product Description
This small plasma sputtering coater uses PLC control system, all touch screen operation, easy to learn and use. This model machine is also equipped with a rotatable sample stage, which can effectively improve the uniformity of the coating. This small plasma sputtering instrument uses a PLC control system, all touch screen operation, easy to learn and use. The equipment is small in size and beautiful in appearance, making it the best choice for laboratory coating experiments. Introducing the Compact 3 Sputter Heads Plasma Sputtering Coater with Rotary Stage, model PSP180G-3TA-RS, featuring a comprehensive set of technical parameters to meet your sputtering needs. The sample stage, measuring 100mm in size, provides precise control with adjustable rotation speeds ranging from 1 to 20rpm. The coater is equipped with three 2-inch plasma sputtering sources, employing natural cooling for temperature regulation. The vacuum chamber boasts dimensions of φ180mm in diameter and 210mm in height, featuring omnidirectional visibility through an observation window. Crafted from high-purity quartz, the chamber's top cover is removable, facilitating easy access. The upper and lower cover materials are constructed from durable 304 stainless steel, ensuring longevity and reliability. The coater integrates a KF16 pumping port and a 1/4 inch ferrule connector for intake. Power configuration includes one DC power supply with a maximum output power of 150W, while the sputtering power reaches up to 1200V with a maximum sputtering current of 50mA. The vacuum system is supported by a dual-stage rotary vane vacuum pump, featuring KF16 pumping and exhaust interfaces, with a pumping rate of 1.1L/s (4m3/h). The ultimate vacuum achieved is ≥0.1Pa, ensuring an effective vacuum environment. Vacuum measurement is facilitated through a resistance vacuum gauge. Power requirements are met with an AC 220V 50Hz power supply, with a total power consumption of 1.5kW. The coater's compact dimensions measure 500mm in length, 320mm in width, and 470mm in height, with a weight of 30kg. This plasma sputtering coater, with its precise specifications, is designed to deliver dependable performance for your sputtering applications.