5 Inch proximity evaporation coating furnace for perovskite solar cells

The 5-inch proximity evaporation coater furnace is a rapid heat treatment furnace with a furnace chamber of a 12-inch diameter quartz tube. This device is specially designed for thermal evaporation (or top and bottom) and has a maximum heating rate of 20°C/s. PID method is adopted for temperature adjustment, and 30 temperature rise and fall programs can be set. An RS485 interface is installed on the instrument panel, which can be equipped with control software to import the heating program and temperature curve into the computer.

Technical Specifications:

1. Supply Voltage: AC220V, 50/60Hz
2. Maximum Power Capacity: 10KW
3. Structure: Two temperature controllers, separately controlling the top and bottom heating elements
4. Flow Meter: Float flow meter to introduce gas into the vacuum chamber
5. Working Temperature: Up to 800°C
6. Heating Rate: ≤10°C/s for each temperature zone heated separately
7. Heating Elements: Two sets of infrared lamps located at the top and bottom
8. Shell: Stainless steel with a water-cooled interlayer for faster cooling
9. Sample Stage: High-rate aluminum nitride ceramic sheet (5" X5" X0.5mm thickness) for uniform heating
10. Bottom Stage: 5" X5" graphite crucible for evaporated raw materials
11. Temperature Control System: Two independent systems for upper and lower heating zones, allowing for 30-stage heating and cooling programs
12. Safety Features: Over-temperature and couple-break protection, PC communication interface, software installation capabilities for temperature control program management
13. Temperature Measurement: Two K-type thermocouples, mounted at the top and bottom
14. Safety Precautions: Air pressure in the furnace tube should not exceed 0.02MPa, pressure reducing valve required for gas cylinder, normal atmospheric pressure inside the tube when the furnace body temperature exceeds 1000°C, gas flow into the furnace tube should remain below 200SCCM, long-term use temperature of the quartz tube should not exceed 1100°C

The furnace features an electric lift cover for opening and a two-way float flowmeter to monitor gas flow accurately. These specifications collectively make the 5-inch Proximity Evaporation Coating Furnace a precise and safe instrument for various applications, including perovskite solar cell research and development.