3" Two zones CSS furnace for rapid thermal processing

The 3" two-zone CSS furnace represents a cutting-edge tool for rapid thermal processing, specifically designed for researching new-generation thin films used in solar cells, including CdTe, Sulfide, and Perovskite solar cells. This furnace employs a dual-heater structure, featuring top and bottom halogen heaters with a maximum heating rate of 20ºC/s. Two 30-segment precision temperature controllers, with an accuracy of +/-1ºC, facilitate precise temperature control. The furnace is equipped with an RS485 port and control software, enabling seamless operation and temperature profile logging via a PC.
 

Constructed within a mobile aluminum alloy frame, the furnace chamber utilizes a high-purity fused quartz tube with dimensions measuring 11" OD/10.8" ID×9" H. The vacuum flanges, made from Stainless Steel 316, ensure durability. The furnace dimensions are 850(L)×745(W)×1615(H) mm, and its top flange includes one KFD-25 vacuum port and two gas outlets, while the bottom flange features one KFD-25 vacuum port and two gas inlets with needle valves. Double silicone o-rings seal the flanges, enabling vacuum pressure of up to 10E-2 Torr with a mechanical pump or 10E-5 Torr with a molecular pump.
 

Heating is achieved using two shortwave IR lamps as heating elements, allowing rapid heating with an adjustable distance between the two heaters (10mm to 50mm). Water-cooled jackets minimize heat radiation and facilitate quick cooling. The furnace includes a built-in 3" round wafer holder with a top heater for substrate loading, ensuring uniform heating with an AlN plate (3"Dia ×0.5mm Thick). Temperature control is accomplished through two precision digital temperature controllers with 30 programmable segments, offering independent control of the top and bottom heaters.
 

The furnace operates on a working voltage of 208-240VAC, single phase, with a 20A air breaker, requiring a total power of 2200W. It comes with a one-year limited warranty, including lifetime support, while consumable parts like quartz tubes and heating lamps are not covered by the warranty. This comprehensive system makes the 3" two-zone CSS furnace an indispensable tool for advanced thin-film research in solar cell applications.

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